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Andrew M. Hawryluk
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Los Altos, CA, US
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last 30 patents
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Patent Grant
Laser annealing systems and methods with ultra-short dwell times
Patent number
10,847,381
Issue date
Nov 24, 2020
Veeco Instruments Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser-based systems and methods for melt-processing of metal layers...
Patent number
10,665,504
Issue date
May 26, 2020
Veeco Instruments Inc.
Serguei Anikitchev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
Patent number
10,249,491
Issue date
Apr 2, 2019
Ultratech, Inc.
Ganesh Sundaram
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
Patent number
10,090,153
Issue date
Oct 2, 2018
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser annealing systems and methods with ultra-short dwell times
Patent number
10,083,843
Issue date
Sep 25, 2018
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
Patent number
9,960,036
Issue date
May 1, 2018
Ultratech, Inc.
Ganesh Sundaram
C30 - CRYSTAL GROWTH
Information
Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
Patent number
9,929,011
Issue date
Mar 27, 2018
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
Patent number
9,768,016
Issue date
Sep 19, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High-efficiency line-forming optical systems and methods for defect...
Patent number
9,711,361
Issue date
Jul 18, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
Patent number
9,691,613
Issue date
Jun 27, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
Patent number
9,666,432
Issue date
May 30, 2017
Ultratech, Inc.
Ganesh Sundaram
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High-efficiency line-forming optical systems and methods for defect...
Patent number
9,613,815
Issue date
Apr 4, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for reducing beam instability in laser annealing
Patent number
9,559,023
Issue date
Jan 31, 2017
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser annealing systems and methods with ultra-short dwell times
Patent number
9,558,973
Issue date
Jan 31, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Non-melt thin-wafer laser thermal annealing methods
Patent number
9,490,128
Issue date
Nov 8, 2016
Ultratech, Inc.
Yun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wynne-Dyson projection lens with reduced susceptibility to UV damage
Patent number
9,436,103
Issue date
Sep 6, 2016
Ultratech, Inc.
Peiqian Zhao
G02 - OPTICS
Information
Patent Grant
Apparatus and methods for improving the intensity profile of a beam...
Patent number
9,401,278
Issue date
Jul 26, 2016
Ultratech, Inc.
Andrew M Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wynn-dyson imaging system with reduced thermal distortion
Patent number
9,341,951
Issue date
May 17, 2016
Ultratech, Inc.
Andrew M. Hawryluk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ultrafast laser annealing with reduced pattern density effects in i...
Patent number
9,302,348
Issue date
Apr 5, 2016
Ultratech Inc.
Yun Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Betavoltaic power sources for transportation applications
Patent number
9,266,437
Issue date
Feb 23, 2016
Ultratech, Inc.
Arthur W. Zafiropoulo
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Laser annealing of GaN LEDs with reduced pattern effects
Patent number
9,190,570
Issue date
Nov 17, 2015
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of laser processing photoresist in a gaseous environment
Patent number
8,986,562
Issue date
Mar 24, 2015
Ultratech, Inc.
Arthur W. Zafiropoulo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Betavoltaic power sources for mobile device applications
Patent number
8,872,408
Issue date
Oct 28, 2014
Ultratech, Inc.
Arthur W. Zafiropoulo
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Laser annealing systems and methods with ultra-short dwell times
Patent number
8,865,603
Issue date
Oct 21, 2014
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
LED-based photolithographic illuminator with high collection effici...
Patent number
8,845,163
Issue date
Sep 30, 2014
Ultratech, Inc.
David G. Stites
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Programmable illuminator for a photolithography system
Patent number
8,823,921
Issue date
Sep 2, 2014
Ultratech, Inc.
Borislav Zlatanov
G02 - OPTICS
Information
Patent Grant
Systems for and methods of laser-enhanced plasma processing of semi...
Patent number
8,796,151
Issue date
Aug 5, 2014
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithographic LED fabrication using phase-shift mask
Patent number
8,796,053
Issue date
Aug 5, 2014
Ultratech, Inc.
Andrew M. Hawryluk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical alignment systems for forming LEDs having a rough surface
Patent number
8,781,213
Issue date
Jul 15, 2014
Ultratech, Inc.
Robert L. Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of characterizing semiconductor light-emitting devices base...
Patent number
8,765,493
Issue date
Jul 1, 2014
Ultratech, Inc.
Andrew M. Hawryluk
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Laser-Based Systems and Methods for Melt-Processing of Metal Layers...
Publication number
20190035682
Publication date
Jan 31, 2019
Ultratech, Inc.
Serguei Anikitchev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser Annealing Systems and Methods With Ultra-Short Dwell Times
Publication number
20190006189
Publication date
Jan 3, 2019
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of Forming Product Wafers Having Semiconductor Light-Emitti...
Publication number
20180226535
Publication date
Aug 9, 2018
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Forming Device Quality Gallium Nitride Lay...
Publication number
20180226241
Publication date
Aug 9, 2018
Ultratech, Inc.
Ganesh Sundaram
C30 - CRYSTAL GROWTH
Information
Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
Publication number
20170256394
Publication date
Sep 7, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
Publication number
20170250070
Publication date
Aug 31, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...
Publication number
20170213718
Publication date
Jul 27, 2017
Ultratech, Inc.
Ganesh Sundaram
C30 - CRYSTAL GROWTH
Information
Patent Application
Full-wafer inspection methods having selectable pixel density
Publication number
20170178980
Publication date
Jun 22, 2017
Ultratech, Inc.
David M. Owen
G01 - MEASURING TESTING
Information
Patent Application
High-efficiency line-forming optical systems and methods for defect...
Publication number
20170162392
Publication date
Jun 8, 2017
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
High-throughput multichamber atomic layer deposition systems and me...
Publication number
20170088952
Publication date
Mar 30, 2017
Ultratech, Inc.
Andrew M. Hawryluk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma-enhanced atomic layer deposition system with rotary reactor...
Publication number
20170062191
Publication date
Mar 2, 2017
Ultratech, Inc.
Arthur W. Zafiropoulo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Laser annealing systems and methods with ultra-short dwell times
Publication number
20160240407
Publication date
Aug 18, 2016
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND PROCESSES FOR FORMING THREE-DIMENSIONAL INTEGRATED CIRC...
Publication number
20160240440
Publication date
Aug 18, 2016
Ultratech, Inc.
Arthur W. Zafiropoulo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...
Publication number
20160203972
Publication date
Jul 14, 2016
Ultratech, Inc.
Ganesh Sundaram
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Laser annealing systems and methods with ultra-short dwell times
Publication number
20160181120
Publication date
Jun 23, 2016
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
Publication number
20160155629
Publication date
Jun 2, 2016
Ultratech, Inc.
Andrew M. Hawryluk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
High-efficiency line-forming optical systems and methods for defect...
Publication number
20160148810
Publication date
May 26, 2016
Ultratech, Inc.
Andrew M. Hawryluk
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser annealing systems and methods with ultra-short dwell times
Publication number
20160086832
Publication date
Mar 24, 2016
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and methods for reducing beam instability in laser annealing
Publication number
20150371911
Publication date
Dec 24, 2015
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Wynne-Dyson projection lens with reduced susceptibility to UV damage
Publication number
20150331326
Publication date
Nov 19, 2015
Ultratech, Inc.
Peiqian Zhao
G02 - OPTICS
Information
Patent Application
Epitaxial growth of compound semiconductors using lattice-tuned dom...
Publication number
20150090180
Publication date
Apr 2, 2015
Ultratech, Inc.
Andrew M. Hawryluk
C30 - CRYSTAL GROWTH
Information
Patent Application
Methods of laser processing photoresist in a gaseous environment
Publication number
20150041431
Publication date
Feb 12, 2015
Ultratech, Inc.
Arthur W. Zafiropoulo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and methods for material processing using light-emitting di...
Publication number
20140238958
Publication date
Aug 28, 2014
Ultratech, Inc.
Arthur W. Zafiropoulo
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and methods for improving the intensity profile of a beam...
Publication number
20140227890
Publication date
Aug 14, 2014
Ultratech, Inc.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wynn-Dyson imaging system with reduced thermal distortion
Publication number
20140176923
Publication date
Jun 26, 2014
Ultratech, Inc.
Andrew M. Hawryluk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF CHARACTERIZING SEMICONDUCTOR LIGHT-EMITTING DEVICES BASE...
Publication number
20140141538
Publication date
May 22, 2014
ULTRATECH, INC.
Andrew M. Hawryluk
G01 - MEASURING TESTING
Information
Patent Application
LASER ANNEALING OF GAN LEDS WITH REDUCED PATTERN EFFECTS
Publication number
20140131723
Publication date
May 15, 2014
ULTRATECH, INC.
Andrew M. Hawryluk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ultrafast laser annealing with reduced pattern density effects in i...
Publication number
20140097171
Publication date
Apr 10, 2014
Yun Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Non-melt thin-wafer laser thermal annealing methods
Publication number
20140057457
Publication date
Feb 27, 2014
ULTRATECH, INC.
Yun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LED-based photolithographic illuminator with high collection effici...
Publication number
20140049978
Publication date
Feb 20, 2014
David G. Stites
H01 - BASIC ELECTRIC ELEMENTS