Andrew M. Hawryluk

Person

Los Altos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laser annealing systems and methods with ultra-short dwell times
- Patent number 10,847,381
- Issue date Nov 24, 2020
- Veeco Instruments Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-based systems and methods for melt-processing of metal layers...
- Patent number 10,665,504
- Issue date May 26, 2020
- Veeco Instruments Inc.
- Serguei Anikitchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 10,249,491
- Issue date Apr 2, 2019
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 10,090,153
- Issue date Oct 2, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing systems and methods with ultra-short dwell times
- Patent number 10,083,843
- Issue date Sep 25, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 9,960,036
- Issue date May 1, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,929,011
- Issue date Mar 27, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,768,016
- Issue date Sep 19, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-efficiency line-forming optical systems and methods for defect...
- Patent number 9,711,361
- Issue date Jul 18, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Formation of heteroepitaxial layers with rapid thermal processing t...
- Patent number 9,691,613
- Issue date Jun 27, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for forming device quality gallium nitride lay...
- Patent number 9,666,432
- Issue date May 30, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-efficiency line-forming optical systems and methods for defect...
- Patent number 9,613,815
- Issue date Apr 4, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for reducing beam instability in laser annealing
- Patent number 9,559,023
- Issue date Jan 31, 2017
- Ultratech, Inc.
- James T. McWhirter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing systems and methods with ultra-short dwell times
- Patent number 9,558,973
- Issue date Jan 31, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Non-melt thin-wafer laser thermal annealing methods
- Patent number 9,490,128
- Issue date Nov 8, 2016
- Ultratech, Inc.
- Yun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wynne-Dyson projection lens with reduced susceptibility to UV damage
- Patent number 9,436,103
- Issue date Sep 6, 2016
- Ultratech, Inc.
- Peiqian Zhao
- G02 - OPTICS
Information Patent Grant
Apparatus and methods for improving the intensity profile of a beam...
- Patent number 9,401,278
- Issue date Jul 26, 2016
- Ultratech, Inc.
- Andrew M Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wynn-dyson imaging system with reduced thermal distortion
- Patent number 9,341,951
- Issue date May 17, 2016
- Ultratech, Inc.
- Andrew M. Hawryluk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ultrafast laser annealing with reduced pattern density effects in i...
- Patent number 9,302,348
- Issue date Apr 5, 2016
- Ultratech Inc.
- Yun Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Betavoltaic power sources for transportation applications
- Patent number 9,266,437
- Issue date Feb 23, 2016
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Laser annealing of GaN LEDs with reduced pattern effects
- Patent number 9,190,570
- Issue date Nov 17, 2015
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of laser processing photoresist in a gaseous environment
- Patent number 8,986,562
- Issue date Mar 24, 2015
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Betavoltaic power sources for mobile device applications
- Patent number 8,872,408
- Issue date Oct 28, 2014
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Laser annealing systems and methods with ultra-short dwell times
- Patent number 8,865,603
- Issue date Oct 21, 2014
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
LED-based photolithographic illuminator with high collection effici...
- Patent number 8,845,163
- Issue date Sep 30, 2014
- Ultratech, Inc.
- David G. Stites
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Programmable illuminator for a photolithography system
- Patent number 8,823,921
- Issue date Sep 2, 2014
- Ultratech, Inc.
- Borislav Zlatanov
- G02 - OPTICS
Information Patent Grant
Systems for and methods of laser-enhanced plasma processing of semi...
- Patent number 8,796,151
- Issue date Aug 5, 2014
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithographic LED fabrication using phase-shift mask
- Patent number 8,796,053
- Issue date Aug 5, 2014
- Ultratech, Inc.
- Andrew M. Hawryluk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical alignment systems for forming LEDs having a rough surface
- Patent number 8,781,213
- Issue date Jul 15, 2014
- Ultratech, Inc.
- Robert L. Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of characterizing semiconductor light-emitting devices base...
- Patent number 8,765,493
- Issue date Jul 1, 2014
- Ultratech, Inc.
- Andrew M. Hawryluk
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Laser-Based Systems and Methods for Melt-Processing of Metal Layers...
- Publication number 20190035682
- Publication date Jan 31, 2019
- Ultratech, Inc.
- Serguei Anikitchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Annealing Systems and Methods With Ultra-Short Dwell Times
- Publication number 20190006189
- Publication date Jan 3, 2019
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Forming Product Wafers Having Semiconductor Light-Emitti...
- Publication number 20180226535
- Publication date Aug 9, 2018
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming Device Quality Gallium Nitride Lay...
- Publication number 20180226241
- Publication date Aug 9, 2018
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20170256394
- Publication date Sep 7, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20170250070
- Publication date Aug 31, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...
- Publication number 20170213718
- Publication date Jul 27, 2017
- Ultratech, Inc.
- Ganesh Sundaram
- C30 - CRYSTAL GROWTH
Information Patent Application
Full-wafer inspection methods having selectable pixel density
- Publication number 20170178980
- Publication date Jun 22, 2017
- Ultratech, Inc.
- David M. Owen
- G01 - MEASURING TESTING
Information Patent Application
High-efficiency line-forming optical systems and methods for defect...
- Publication number 20170162392
- Publication date Jun 8, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
High-throughput multichamber atomic layer deposition systems and me...
- Publication number 20170088952
- Publication date Mar 30, 2017
- Ultratech, Inc.
- Andrew M. Hawryluk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma-enhanced atomic layer deposition system with rotary reactor...
- Publication number 20170062191
- Publication date Mar 2, 2017
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser annealing systems and methods with ultra-short dwell times
- Publication number 20160240407
- Publication date Aug 18, 2016
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND PROCESSES FOR FORMING THREE-DIMENSIONAL INTEGRATED CIRC...
- Publication number 20160240440
- Publication date Aug 18, 2016
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...
- Publication number 20160203972
- Publication date Jul 14, 2016
- Ultratech, Inc.
- Ganesh Sundaram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser annealing systems and methods with ultra-short dwell times
- Publication number 20160181120
- Publication date Jun 23, 2016
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...
- Publication number 20160155629
- Publication date Jun 2, 2016
- Ultratech, Inc.
- Andrew M. Hawryluk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-efficiency line-forming optical systems and methods for defect...
- Publication number 20160148810
- Publication date May 26, 2016
- Ultratech, Inc.
- Andrew M. Hawryluk
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser annealing systems and methods with ultra-short dwell times
- Publication number 20160086832
- Publication date Mar 24, 2016
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods for reducing beam instability in laser annealing
- Publication number 20150371911
- Publication date Dec 24, 2015
- Ultratech, Inc.
- James T. McWhirter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wynne-Dyson projection lens with reduced susceptibility to UV damage
- Publication number 20150331326
- Publication date Nov 19, 2015
- Ultratech, Inc.
- Peiqian Zhao
- G02 - OPTICS
Information Patent Application
Epitaxial growth of compound semiconductors using lattice-tuned dom...
- Publication number 20150090180
- Publication date Apr 2, 2015
- Ultratech, Inc.
- Andrew M. Hawryluk
- C30 - CRYSTAL GROWTH
Information Patent Application
Methods of laser processing photoresist in a gaseous environment
- Publication number 20150041431
- Publication date Feb 12, 2015
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods for material processing using light-emitting di...
- Publication number 20140238958
- Publication date Aug 28, 2014
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus and methods for improving the intensity profile of a beam...
- Publication number 20140227890
- Publication date Aug 14, 2014
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wynn-Dyson imaging system with reduced thermal distortion
- Publication number 20140176923
- Publication date Jun 26, 2014
- Ultratech, Inc.
- Andrew M. Hawryluk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF CHARACTERIZING SEMICONDUCTOR LIGHT-EMITTING DEVICES BASE...
- Publication number 20140141538
- Publication date May 22, 2014
- ULTRATECH, INC.
- Andrew M. Hawryluk
- G01 - MEASURING TESTING
Information Patent Application
LASER ANNEALING OF GAN LEDS WITH REDUCED PATTERN EFFECTS
- Publication number 20140131723
- Publication date May 15, 2014
- ULTRATECH, INC.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultrafast laser annealing with reduced pattern density effects in i...
- Publication number 20140097171
- Publication date Apr 10, 2014
- Yun Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Non-melt thin-wafer laser thermal annealing methods
- Publication number 20140057457
- Publication date Feb 27, 2014
- ULTRATECH, INC.
- Yun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LED-based photolithographic illuminator with high collection effici...
- Publication number 20140049978
- Publication date Feb 20, 2014
- David G. Stites
- H01 - BASIC ELECTRIC ELEMENTS

Andrew M. Hawryluk

Person

Patents Grantslast 30 patents

Laser annealing systems and methods with ultra-short dwell times

Laser-based systems and methods for melt-processing of metal layers...

Method and apparatus for forming device quality gallium nitride lay...

Formation of heteroepitaxial layers with rapid thermal processing t...

Laser annealing systems and methods with ultra-short dwell times

Method and apparatus for forming device quality gallium nitride lay...

Formation of heteroepitaxial layers with rapid thermal processing t...

Formation of heteroepitaxial layers with rapid thermal processing t...

High-efficiency line-forming optical systems and methods for defect...

Formation of heteroepitaxial layers with rapid thermal processing t...

Method and apparatus for forming device quality gallium nitride lay...

High-efficiency line-forming optical systems and methods for defect...

Systems and methods for reducing beam instability in laser annealing

Laser annealing systems and methods with ultra-short dwell times

Non-melt thin-wafer laser thermal annealing methods

Wynne-Dyson projection lens with reduced susceptibility to UV damage

Apparatus and methods for improving the intensity profile of a beam...

Wynn-dyson imaging system with reduced thermal distortion

Ultrafast laser annealing with reduced pattern density effects in i...

Betavoltaic power sources for transportation applications

Laser annealing of GaN LEDs with reduced pattern effects

Methods of laser processing photoresist in a gaseous environment

Betavoltaic power sources for mobile device applications

Laser annealing systems and methods with ultra-short dwell times

LED-based photolithographic illuminator with high collection effici...

Programmable illuminator for a photolithography system

Systems for and methods of laser-enhanced plasma processing of semi...

Photolithographic LED fabrication using phase-shift mask

Optical alignment systems for forming LEDs having a rough surface

Methods of characterizing semiconductor light-emitting devices base...

Patents Applicationslast 30 patents

Laser-Based Systems and Methods for Melt-Processing of Metal Layers...

Laser Annealing Systems and Methods With Ultra-Short Dwell Times

Methods of Forming Product Wafers Having Semiconductor Light-Emitti...

Method and Apparatus for Forming Device Quality Gallium Nitride Lay...

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...

Full-wafer inspection methods having selectable pixel density

High-efficiency line-forming optical systems and methods for defect...

High-throughput multichamber atomic layer deposition systems and me...

Plasma-enhanced atomic layer deposition system with rotary reactor...

Laser annealing systems and methods with ultra-short dwell times

SYSTEMS AND PROCESSES FOR FORMING THREE-DIMENSIONAL INTEGRATED CIRC...

METHOD AND APPARATUS FOR FORMING DEVICE QUALITY GALLIUM NITRIDE LAY...

Laser annealing systems and methods with ultra-short dwell times

FORMATION OF HETEROEPITAXIAL LAYERS WITH RAPID THERMAL PROCESSING T...

High-efficiency line-forming optical systems and methods for defect...

Laser annealing systems and methods with ultra-short dwell times

Systems and methods for reducing beam instability in laser annealing

Wynne-Dyson projection lens with reduced susceptibility to UV damage

Epitaxial growth of compound semiconductors using lattice-tuned dom...

Methods of laser processing photoresist in a gaseous environment

Systems and methods for material processing using light-emitting di...

Apparatus and methods for improving the intensity profile of a beam...

Wynn-Dyson imaging system with reduced thermal distortion

METHODS OF CHARACTERIZING SEMICONDUCTOR LIGHT-EMITTING DEVICES BASE...

LASER ANNEALING OF GAN LEDS WITH REDUCED PATTERN EFFECTS

Ultrafast laser annealing with reduced pattern density effects in i...

Non-melt thin-wafer laser thermal annealing methods

LED-based photolithographic illuminator with high collection effici...