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Andrew Nolan
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Kurokawa-gun, JP
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last 30 patents
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Patent Grant
Surface modification process
Patent number
10,937,664
Issue date
Mar 2, 2021
Tokyo Electron Limited
Cedric Thomas
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of surface restoration for nitride etching
Patent number
10,811,273
Issue date
Oct 20, 2020
Tokyo Electron Limited
Christopher Talone
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SURFACE MODIFICATION PROCESS
Publication number
20200075734
Publication date
Mar 5, 2020
TOKYO ELECTRON LIMITED
Cedric Thomas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of Surface Restoration for Nitride Etching
Publication number
20190080926
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Christopher Talone
H01 - BASIC ELECTRIC ELEMENTS