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Andrew R. Neureuther
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Berkeley, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Phase shifting test mask patterns for characterizing illumination a...
Patent number
7,648,802
Issue date
Jan 19, 2010
The Regents of the University of California
Andrew R. Neureuther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase-shifting test mask patterns for characterizing illumination p...
Patent number
7,224,458
Issue date
May 29, 2007
The Regents of the University of California
Gregory R. McIntyre
G01 - MEASURING TESTING
Information
Patent Grant
Characterizing aberrations in an imaging lens and applications to v...
Patent number
7,030,997
Issue date
Apr 18, 2006
The Regents of the University of California
Andrew R. Neureuther
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for enhancing resist sensitivity and resolutio...
Patent number
6,686,132
Issue date
Feb 3, 2004
The Regents of the University of California
MoSong Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for making masks
Patent number
5,326,659
Issue date
Jul 5, 1994
Regents of the University of California
Yong Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Phase shifting test mask patterns for characterizing illumination a...
Publication number
20070053576
Publication date
Mar 8, 2007
The Regents of the University of California
Andrew R. Neureuther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Phase-shifting test mask patterns for characterizing illumination p...
Publication number
20060187451
Publication date
Aug 24, 2006
The Regents of the University of California.
Gregory R. McIntyre
G01 - MEASURING TESTING
Information
Patent Application
Characterizing aberrations in an imaging lens and applications to v...
Publication number
20030103189
Publication date
Jun 5, 2003
The Regents of the University of California
Andrew R. Neureuther
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for enhancing resist sensitivity and resolutio...
Publication number
20030008246
Publication date
Jan 9, 2003
MoSong Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY