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Andrew Rubin
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Thuwal, SA
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last 30 patents
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Patent Grant
Silicon germanium mask for deep silicon etching
Patent number
8,791,021
Issue date
Jul 29, 2014
King Abdullah University of Science and Technology
Mohamed Serry
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
SILICON GERMANIUM MASK FOR DEEP SILICON ETCHING
Publication number
20120225557
Publication date
Sep 6, 2012
THE AMERICAN UNIVERSITY IN CAIRO
Mohamed Serry
B81 - MICRO-STRUCTURAL TECHNOLOGY