Andrew S. Li

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of plasma etching silicon nitride
- Patent number 6,962,879
- Issue date Nov 8, 2005
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of plasma etching silicon nitride
- Publication number 20020182880
- Publication date Dec 5, 2002
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS