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Chemical mechanical polishing pad
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Patent number 7,569,268
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Issue date Aug 4, 2009
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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T. Todd Crkvenac
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B24 - GRINDING POLISHING
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Polishing pad apparatus and methods
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Patent number 6,899,612
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Issue date May 31, 2005
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Andrew Scott Lawing
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B24 - GRINDING POLISHING
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Metals removal process
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Patent number 6,083,413
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Issue date Jul 4, 2000
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Massachusetts Institute of Technology
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Herbert H. Sawin
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B08 - CLEANING
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