Andrew V. Hill

Person

Berkley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning overlay metrology with high signal to noise ratio
- Patent number 12,235,588
- Issue date Feb 25, 2025
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Single grab overlay measurement of tall targets
- Patent number 12,066,322
- Issue date Aug 20, 2024
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Imaging overlay with mutually coherent oblique illumination
- Patent number 12,032,300
- Issue date Jul 9, 2024
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Enhancing performance of overlay metrology
- Patent number 12,001,148
- Issue date Jun 4, 2024
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Sensitive optical metrology in scanning and static modes
- Patent number 11,933,717
- Issue date Mar 19, 2024
- KLA Corporation
- Andrew V. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Massive overlay metrology sampling with multiple measurement columns
- Patent number 11,899,375
- Issue date Feb 13, 2024
- KLA Corporation
- Jonathan Madsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for metrology with layer-specific illumination...
- Patent number 11,852,590
- Issue date Dec 26, 2023
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Moiré scatterometry overlay
- Patent number 11,841,621
- Issue date Dec 12, 2023
- KLA Corporation CA
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-directional overlay metrology using multiple illumination par...
- Patent number 11,800,212
- Issue date Oct 24, 2023
- KLA Corporation
- Yonatan Vaknin
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Modulation of scanning velocity during overlay metrology
- Patent number 11,719,533
- Issue date Aug 8, 2023
- KLA Corporation
- David L. Brown
- G01 - MEASURING TESTING
Information Patent Grant
Broadband illumination tuning
- Patent number 11,662,562
- Issue date May 30, 2023
- KLA Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Grant
Enhancing performance of overlay metrology
- Patent number 11,592,755
- Issue date Feb 28, 2023
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Parallel scatterometry overlay metrology
- Patent number 11,531,275
- Issue date Dec 20, 2022
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Multi-field scanning overlay metrology
- Patent number 11,526,086
- Issue date Dec 13, 2022
- KLA Corporation
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging system for buried metrology targets
- Patent number 11,512,948
- Issue date Nov 29, 2022
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Scanning scatterometry overlay measurement
- Patent number 11,428,642
- Issue date Aug 30, 2022
- KLA Corporation
- Andrew V. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Darkfield imaging of grating target structures for overlay measurement
- Patent number 11,359,916
- Issue date Jun 14, 2022
- KLA Corporation
- Andrew V. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement modes for overlay
- Patent number 11,346,657
- Issue date May 31, 2022
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for optimizing focus for imaging-based overlay...
- Patent number 11,313,669
- Issue date Apr 26, 2022
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Pupil-plane beam scanning for metrology
- Patent number 11,300,524
- Issue date Apr 12, 2022
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Grey-mode scanning scatterometry overlay metrology
- Patent number 11,300,405
- Issue date Apr 12, 2022
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for optical three dimensional topography measurement
- Patent number 11,287,248
- Issue date Mar 29, 2022
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Spectral filter for high-power fiber illumination sources
- Patent number 11,187,838
- Issue date Nov 30, 2021
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
High-brightness illumination source for optical metrology
- Patent number 11,156,846
- Issue date Oct 26, 2021
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Efficient illumination shaping for scatterometry overlay
- Patent number 11,118,903
- Issue date Sep 14, 2021
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Metrology target for scanning metrology
- Patent number 11,073,768
- Issue date Jul 27, 2021
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Polarization measurements of metrology targets and corresponding ta...
- Patent number 11,060,845
- Issue date Jul 13, 2021
- KLA Corporation
- Eran Amit
- G01 - MEASURING TESTING
Information Patent Grant
Nano-structured non-polarizing beamsplitter
- Patent number 10,976,562
- Issue date Apr 13, 2021
- KLA Corporation
- Dmitry Gorelik
- G02 - OPTICS
Information Patent Grant
Reflective pupil relay system
- Patent number 10,976,249
- Issue date Apr 13, 2021
- KLA-Tencor Corporation
- Andrew Hill
- G02 - OPTICS
Information Patent Grant
On the fly target acquisition
- Patent number 10,684,563
- Issue date Jun 16, 2020
- KLA-Tencor Corporation
- Amnon Manassen
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
MULTI-COLUMN LARGE FIELD OF VIEW IMAGING PLATFORM
- Publication number 20250093786
- Publication date Mar 20, 2025
- KLA Corporation
- Yonatan Vaknin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPECTRAL ANGULAR METROLOGY
- Publication number 20250076208
- Publication date Mar 6, 2025
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING...
- Publication number 20240337952
- Publication date Oct 10, 2024
- KLA Corporation
- Itay Gdor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES
- Publication number 20240337606
- Publication date Oct 10, 2024
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION
- Publication number 20240329543
- Publication date Oct 3, 2024
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
OSCILLATING SECONDARY STAGE FOR FRAME-MODE OVERLAY METROLOGY
- Publication number 20240290643
- Publication date Aug 29, 2024
- KLA Corporation
- Izhar Agam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING OVERLAY METROLOGY WITH HIGH SIGNAL TO NOISE RATIO
- Publication number 20240280914
- Publication date Aug 22, 2024
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
SINGLE GRAB OVERLAY MEASUREMENT OF TALL TARGETS
- Publication number 20240159585
- Publication date May 16, 2024
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS
- Publication number 20240027919
- Publication date Jan 25, 2024
- KLA Corporation
- Jonathan Madsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
- Publication number 20230400780
- Publication date Dec 14, 2023
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS
- Publication number 20230359129
- Publication date Nov 9, 2023
- Jonathan Madsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-DIRECTIONAL OVERLAY METROLOGY USING MULTIPLE ILLUMINATION PAR...
- Publication number 20230328351
- Publication date Oct 12, 2023
- Yonatan Vaknin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING SCATTEROMETRY OVERLAY METROLOGY
- Publication number 20230314319
- Publication date Oct 5, 2023
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION
- Publication number 20230259040
- Publication date Aug 17, 2023
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOIRÉ SCATTEROMETRY OVERLAY
- Publication number 20230133640
- Publication date May 4, 2023
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
OBLIQUE ILLUMINATION FOR OVERLAY METROLOGY
- Publication number 20220357674
- Publication date Nov 10, 2022
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR ABSOLUTE SAMPLE POSITIONING
- Publication number 20220344192
- Publication date Oct 27, 2022
- KLA Corporation
- Yoav Grauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
- Publication number 20220317577
- Publication date Oct 6, 2022
- KLA Corporation
- Amnon Manassen
- G02 - OPTICS
Information Patent Application
Modulation Of Scanning Velocity During Overlay Metrology
- Publication number 20220307825
- Publication date Sep 29, 2022
- KLA Corporation
- David L. Brown
- G01 - MEASURING TESTING
Information Patent Application
MULTI-FIELD SCANNING OVERLAY METROLOGY
- Publication number 20220283514
- Publication date Sep 8, 2022
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
SCANNING SCATTEROMETRY OVERLAY MEASUREMENT
- Publication number 20220214285
- Publication date Jul 7, 2022
- KLA Corporation
- Andrew V. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GREY-MODE SCANNING SCATTEROMETRY OVERLAY METROLOGY
- Publication number 20220034652
- Publication date Feb 3, 2022
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
IMAGING SYSTEM FOR BURIED METROLOGY TARGETS
- Publication number 20210372784
- Publication date Dec 2, 2021
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
Measurement Modes for Overlay
- Publication number 20210364279
- Publication date Nov 25, 2021
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY TARGET FOR SCANNING METROLOGY
- Publication number 20210311401
- Publication date Oct 7, 2021
- KLA Corporation
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BROADBAND ILLUMINATION TUNING
- Publication number 20210247601
- Publication date Aug 12, 2021
- KLA Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Application
Sensitive Optical Metrology in Scanning and Static Modes
- Publication number 20210096061
- Publication date Apr 1, 2021
- KLA Corporation
- Andrew V. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DARKFIELD IMAGING OF GRATING TARGET STRUCTURES FOR OVERLAY MEASUREMENT
- Publication number 20210072021
- Publication date Mar 11, 2021
- KLA Corporation
- Andrew V. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Metrology Target for Scanning Metrology
- Publication number 20200409271
- Publication date Dec 31, 2020
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
High-Brightness Illumination Source for Optical Metrology
- Publication number 20200333612
- Publication date Oct 22, 2020
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING

Andrew V. Hill

Person

Patents Grantslast 30 patents

Scanning overlay metrology with high signal to noise ratio

Single grab overlay measurement of tall targets

Imaging overlay with mutually coherent oblique illumination

Enhancing performance of overlay metrology

Sensitive optical metrology in scanning and static modes

Massive overlay metrology sampling with multiple measurement columns

Systems and methods for metrology with layer-specific illumination...

Moiré scatterometry overlay

Multi-directional overlay metrology using multiple illumination par...

Modulation of scanning velocity during overlay metrology

Broadband illumination tuning

Enhancing performance of overlay metrology

Parallel scatterometry overlay metrology

Multi-field scanning overlay metrology

Imaging system for buried metrology targets

Scanning scatterometry overlay measurement

Darkfield imaging of grating target structures for overlay measurement

Measurement modes for overlay

Systems and methods for optimizing focus for imaging-based overlay...

Pupil-plane beam scanning for metrology

Grey-mode scanning scatterometry overlay metrology

Method and system for optical three dimensional topography measurement

Spectral filter for high-power fiber illumination sources

High-brightness illumination source for optical metrology

Efficient illumination shaping for scatterometry overlay

Metrology target for scanning metrology

Polarization measurements of metrology targets and corresponding ta...

Nano-structured non-polarizing beamsplitter

Reflective pupil relay system

On the fly target acquisition

Patents Applicationslast 30 patents

MULTI-COLUMN LARGE FIELD OF VIEW IMAGING PLATFORM

SPECTRAL ANGULAR METROLOGY

SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING...

PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES

IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION

OSCILLATING SECONDARY STAGE FOR FRAME-MODE OVERLAY METROLOGY

SCANNING OVERLAY METROLOGY WITH HIGH SIGNAL TO NOISE RATIO

SINGLE GRAB OVERLAY MEASUREMENT OF TALL TARGETS

MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS

ENHANCING PERFORMANCE OF OVERLAY METROLOGY

MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS

MULTI-DIRECTIONAL OVERLAY METROLOGY USING MULTIPLE ILLUMINATION PAR...

SCANNING SCATTEROMETRY OVERLAY METROLOGY

IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION

MOIRÉ SCATTEROMETRY OVERLAY

OBLIQUE ILLUMINATION FOR OVERLAY METROLOGY

SYSTEMS AND METHODS FOR ABSOLUTE SAMPLE POSITIONING

ENHANCING PERFORMANCE OF OVERLAY METROLOGY

Modulation Of Scanning Velocity During Overlay Metrology

MULTI-FIELD SCANNING OVERLAY METROLOGY

SCANNING SCATTEROMETRY OVERLAY MEASUREMENT

GREY-MODE SCANNING SCATTEROMETRY OVERLAY METROLOGY

IMAGING SYSTEM FOR BURIED METROLOGY TARGETS

Measurement Modes for Overlay

METROLOGY TARGET FOR SCANNING METROLOGY

BROADBAND ILLUMINATION TUNING

Sensitive Optical Metrology in Scanning and Static Modes

DARKFIELD IMAGING OF GRATING TARGET STRUCTURES FOR OVERLAY MEASUREMENT

Metrology Target for Scanning Metrology

High-Brightness Illumination Source for Optical Metrology