Andrew Wilson

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Forest Hills, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Linear Stage for reflective electron beam lithography
- Patent number 9,690,213
- Issue date Jun 27, 2017
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Linear stage and metrology architecture for reflective electron bea...
- Patent number 8,724,115
- Issue date May 13, 2014
- KLA-Tencor Corporation
- Upendra Ummethala
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Linear Stage and Metrology Architecture for Reflective Electron Bea...
- Publication number 20130342827
- Publication date Dec 26, 2013
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Application
Linear Stage for Reflective Electron Beam Lithography
- Publication number 20130293865
- Publication date Nov 7, 2013
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY