Andrew Zeng

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-wavelength interferometry for defect classification
- Patent number 11,017,520
- Issue date May 25, 2021
- KLA Corporation
- Andrew Zeng
- G01 - MEASURING TESTING
Information Patent Grant
Scanning differential interference contrast in an imaging system de...
- Patent number 10,705,026
- Issue date Jul 7, 2020
- KLA Corporation
- Andrew Zeng
- G02 - OPTICS
Information Patent Grant
Transparent film error correction pattern in wafer geometry system
- Patent number 10,571,248
- Issue date Feb 25, 2020
- KLA-Tencor Corporation
- Helen Liu
- G01 - MEASURING TESTING
Information Patent Grant
System and method for measuring substrate and film thickness distri...
- Patent number 10,236,222
- Issue date Mar 19, 2019
- KLA-Tencor Corporation
- Dengpeng Chen
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to fold optics in tools for measuring shape an...
- Patent number 9,279,663
- Issue date Mar 8, 2016
- KLA-Tencor Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method for reducing wafer shape and thickness measurement errors re...
- Patent number 9,121,684
- Issue date Sep 1, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for improved localized feature quantification i...
- Patent number 8,630,479
- Issue date Jan 14, 2014
- KLA-Tencor Corporation
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 7,315,365
- Issue date Jan 1, 2008
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 7,038,772
- Issue date May 2, 2006
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 7,016,031
- Issue date Mar 21, 2006
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Grant
Defect detection system
- Patent number 6,862,096
- Issue date Mar 1, 2005
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
System and methods for classifying anomalies of sample surfaces
- Patent number 6,590,645
- Issue date Jul 8, 2003
- KLA-Tencor Corporation
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Grant
Defect detection system
- Patent number 6,538,730
- Issue date Mar 25, 2003
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...
- Publication number 20200132608
- Publication date Apr 30, 2020
- KLA Corporation
- Raymond Chu
- G02 - OPTICS
Information Patent Application
Multi-Wavelength Interferometry for Defect Classification
- Publication number 20200074617
- Publication date Mar 5, 2020
- KLA Corporation
- Andrew Zeng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Measuring Substrate and Film Thickness Distri...
- Publication number 20180226304
- Publication date Aug 9, 2018
- KLA-Tencor Corporation
- Dengpeng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transparent Film Error Correction Pattern in Wafer Geometry System
- Publication number 20180195855
- Publication date Jul 12, 2018
- KLA-Tencor Corporation
- Helen Liu
- G01 - MEASURING TESTING
Information Patent Application
REDUCING REGISTRATION ERROR OF FRONT AND BACK WAFER SURFACES UTILIZ...
- Publication number 20150192404
- Publication date Jul 9, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...
- Publication number 20140029016
- Publication date Jan 30, 2014
- KLA-Tencor Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
Method for Reducing Wafer Shape and Thickness Measurement Errors Re...
- Publication number 20130182262
- Publication date Jul 18, 2013
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVED LOCALIZED FEATURE QUANTIFICATION I...
- Publication number 20120177282
- Publication date Jul 12, 2012
- KLA-Tencor Corporation
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and methods for classifying anomalies of sample surfaces
- Publication number 20060192951
- Publication date Aug 31, 2006
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Application
Defect detection system
- Publication number 20050018181
- Publication date Jan 27, 2005
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
System and methods for classifying anomalies of sample surfaces
- Publication number 20040169852
- Publication date Sep 2, 2004
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Application
System and methods for classifying anomalies of sample surfaces
- Publication number 20040085532
- Publication date May 6, 2004
- Wayne Chen
- G01 - MEASURING TESTING
Information Patent Application
Defect detection system
- Publication number 20030210393
- Publication date Nov 13, 2003
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
Defect detection system
- Publication number 20020145732
- Publication date Oct 10, 2002
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING

Andrew Zeng

Person

Patents Grantslast 30 patents

Multi-wavelength interferometry for defect classification

Scanning differential interference contrast in an imaging system de...

Transparent film error correction pattern in wafer geometry system

System and method for measuring substrate and film thickness distri...

Method and apparatus to fold optics in tools for measuring shape an...

Method for reducing wafer shape and thickness measurement errors re...

Methods and systems for improved localized feature quantification i...

System and methods for classifying anomalies of sample surfaces

System and methods for classifying anomalies of sample surfaces

System and methods for classifying anomalies of sample surfaces

Defect detection system

System and methods for classifying anomalies of sample surfaces

Defect detection system

Patents Applicationslast 30 patents

SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...

Multi-Wavelength Interferometry for Defect Classification

System and Method for Measuring Substrate and Film Thickness Distri...

Transparent Film Error Correction Pattern in Wafer Geometry System

REDUCING REGISTRATION ERROR OF FRONT AND BACK WAFER SURFACES UTILIZ...

METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...

Method for Reducing Wafer Shape and Thickness Measurement Errors Re...

METHODS AND SYSTEMS FOR IMPROVED LOCALIZED FEATURE QUANTIFICATION I...

System and methods for classifying anomalies of sample surfaces

Defect detection system

System and methods for classifying anomalies of sample surfaces

System and methods for classifying anomalies of sample surfaces

Defect detection system

Defect detection system