Andrey Alexandrovich NIKIPELOV

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus
- Patent number 12,117,736
- Issue date Oct 15, 2024
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for cleaning an inspection system
- Patent number 12,055,478
- Issue date Aug 6, 2024
- ASML Netherlands B.V.
- Andrey Nikipelov
- G01 - MEASURING TESTING
Information Patent Grant
Method for providing a wear-resistant material on a body, and compo...
- Patent number 11,874,607
- Issue date Jan 16, 2024
- ASML Netherlands B.V.
- Andrey Nikipelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane for EUV lithography
- Patent number 11,762,281
- Issue date Sep 19, 2023
- ASML Netherlands B.V.
- Maxim Aleksandrovich Nasalevich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Membrane cleaning apparatus
- Patent number 11,673,169
- Issue date Jun 13, 2023
- ASML Netherlands B.V.
- Andrey Nikipelov
- B08 - CLEANING
Information Patent Grant
Object in a lithographic apparatus
- Patent number 11,550,234
- Issue date Jan 10, 2023
- ASML Netherlands B.V.
- Andrey Nikipelov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
End facet protection for a radiation source and a method for use in...
- Patent number 11,287,747
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Andrey Nikipelov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus and plasma-cleaning station for cooling apparatus
- Patent number 11,287,752
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus and plasma-cleaning station for cooling apparatus
- Patent number 11,231,657
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radioisotope production
- Patent number 11,170,907
- Issue date Nov 9, 2021
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Lithographic apparatus comprising an object with an upper layer hav...
- Patent number 11,143,975
- Issue date Oct 12, 2021
- ASML Netherlands B.V.
- Andrey Nikipelov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Component for use in a patterning device environment
- Patent number 11,048,180
- Issue date Jun 29, 2021
- ASML Netherlands B.V.
- Andrey Nikipelov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor mark and a method of manufacturing a sensor mark
- Patent number 10,976,196
- Issue date Apr 13, 2021
- ASML Netherlands B.V.
- Joost André Klugkist
- G01 - MEASURING TESTING
Information Patent Grant
Information determining apparatus and method
- Patent number 10,948,837
- Issue date Mar 16, 2021
- ASML Netherlands B.V.
- An Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane for EUV lithography
- Patent number 10,908,496
- Issue date Feb 2, 2021
- ASML Netherlands B.V.
- Maxim Aleksandrovich Nasalevich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 10,884,339
- Issue date Jan 5, 2021
- ASML Netherlands B.V.
- Wouter Joep Engelen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Radiation source having debris control
- Patent number 10,588,211
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Rolf Theodorus Nicolaas Beijsens
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam delivery apparatus and method
- Patent number 10,580,545
- Issue date Mar 3, 2020
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electron source for a free electron laser
- Patent number 10,468,225
- Issue date Nov 5, 2019
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic method
- Patent number 10,437,154
- Issue date Oct 8, 2019
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- G01 - MEASURING TESTING
Information Patent Grant
Membranes for use within a lithographic apparatus and a lithographi...
- Patent number 10,228,615
- Issue date Mar 12, 2019
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- G02 - OPTICS
Information Patent Grant
Electron injector and free electron laser
- Patent number 10,103,508
- Issue date Oct 16, 2018
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus
- Patent number 10,031,422
- Issue date Jul 24, 2018
- ASML Netherlands B.V.
- Andrey Nikipelov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for generating radiation
- Patent number 9,986,628
- Issue date May 29, 2018
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Undulator
- Patent number 9,952,513
- Issue date Apr 24, 2018
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source
- Patent number 9,853,412
- Issue date Dec 26, 2017
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic method
- Patent number 9,823,572
- Issue date Nov 21, 2017
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source-collector and method for manufacture
- Patent number 9,773,578
- Issue date Sep 26, 2017
- ASML Netherlands B.V.
- Alexey Sergeevich Kuznetsov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron injector and free electron laser
- Patent number 9,728,931
- Issue date Aug 8, 2017
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
A CLEANING METHOD AND ASSOCIATED ILLUMINATION SOURCE METROLOGY APPA...
- Publication number 20240377765
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM
- Publication number 20240353315
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT
- Publication number 20240337956
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Lucas Christiaan Johan HEIJMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMBRANE CLEANING APPARATUS
- Publication number 20240142871
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMBRANE FOR EUV LITHOGRAPHY
- Publication number 20240004283
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Maxim Aleksandrovich Nasalevich
- G02 - OPTICS
Information Patent Application
MEMBRANE CLEANING APPARATUS
- Publication number 20230311173
- Publication date Oct 5, 2023
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
- Publication number 20230314930
- Publication date Oct 5, 2023
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich BANINE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...
- Publication number 20230063156
- Publication date Mar 2, 2023
- ASML Holding N.V.
- Ronald Peter ALBRIGHT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A LITHOGRAPHIC APPARATUS
- Publication number 20220342315
- Publication date Oct 27, 2022
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
- Publication number 20220276553
- Publication date Sep 1, 2022
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR PROVIDING A WEAR-RESISTANT MATERIAL ON A BODY, AND COMPO...
- Publication number 20220206396
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM
- Publication number 20220205900
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD O...
- Publication number 20220082945
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMBRANE CLEANING APPARATUS
- Publication number 20220008963
- Publication date Jan 13, 2022
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- B08 - CLEANING
Information Patent Application
AN OBJECT IN A LITHOGRAPHIC APPARATUS
- Publication number 20210397100
- Publication date Dec 23, 2021
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSMISSIVE DIFFUSOR
- Publication number 20210382209
- Publication date Dec 9, 2021
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- B82 - NANO-TECHNOLOGY
Information Patent Application
RADIOISOTOPE PRODUCTION
- Publication number 20210375498
- Publication date Dec 2, 2021
- ASML NETHERLANDS B.V.
- Pieter Willem Herman DE JAGER
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
A LITHOGRAPHIC APPARATUS COMPRISING AN OBJECT WITH AN UPPER LAYER H...
- Publication number 20210132517
- Publication date May 6, 2021
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMBRANE FOR EUV LITHOGRAPHY
- Publication number 20210109438
- Publication date Apr 15, 2021
- ASML NETHERLANDS B.V.
- Maxim Aleksandrovich Nasalevich
- G02 - OPTICS
Information Patent Application
END FACET PROTECTION FOR A RADIATION SOURCE AND A METHOD FOR USE IN...
- Publication number 20210063893
- Publication date Mar 4, 2021
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION SYSTEM, LITHOGRAPHIC APPARATUS, AND INSPECTION METHOD
- Publication number 20210055660
- Publication date Feb 25, 2021
- ASML NETHERLANDS B.V.
- Alexey Olegovich POLYAKOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING APPARATUS AND PLASMA-CLEANING STATION FOR COOLING APPARATUS
- Publication number 20200233319
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Adrianus, Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Component for Use in a Patterning Device Environment
- Publication number 20200096880
- Publication date Mar 26, 2020
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR MARK AND A METHOD OF MANUFACTURING A SENSOR MARK
- Publication number 20200064183
- Publication date Feb 27, 2020
- ASML NETHERLANDS B.V.
- Joost André KLUGKIST
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20190302625
- Publication date Oct 3, 2019
- ASML NETHERLANDS B.V.
- Wouter Joep ENGELEN
- G01 - MEASURING TESTING
Information Patent Application
A MEMBRANE FOR EUV LITHOGRAPHY
- Publication number 20190129299
- Publication date May 2, 2019
- ASML NETHERLANDS B.V.
- Maxim Aleksandrovich NASALEVICH
- G02 - OPTICS
Information Patent Application
Radioisotope Production
- Publication number 20190066859
- Publication date Feb 28, 2019
- ASML NETHERLANDS B.V.
- Pieter Willem Herman DE JAGER
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Electron Source for a Free Electron Laser
- Publication number 20190035594
- Publication date Jan 31, 2019
- ASML NETHERLANDS B.V.
- Andrey Alexandrovich NIKIPELOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20180081278
- Publication date Mar 22, 2018
- ASML NETHERLANDS B.V.
- Andrey Alexandrovich NIKIPELOV
- G01 - MEASURING TESTING
Information Patent Application
Electron Injector and Free Electron Laser
- Publication number 20170264071
- Publication date Sep 14, 2017
- ASML NETHERLANDS B.V.
- Andrey Alexandrovich NIKIPELOV
- H01 - BASIC ELECTRIC ELEMENTS

Andrey Alexandrovich NIKIPELOV

Person

Patents Grantslast 30 patents

Lithographic apparatus

Apparatus and method for cleaning an inspection system

Method for providing a wear-resistant material on a body, and compo...

Membrane for EUV lithography

Membrane cleaning apparatus

Object in a lithographic apparatus

End facet protection for a radiation source and a method for use in...

Cooling apparatus and plasma-cleaning station for cooling apparatus

Cooling apparatus and plasma-cleaning station for cooling apparatus

Radioisotope production

Lithographic apparatus comprising an object with an upper layer hav...

Component for use in a patterning device environment

Sensor mark and a method of manufacturing a sensor mark

Information determining apparatus and method

Membrane for EUV lithography

Lithographic method

Radiation source having debris control

Beam delivery apparatus and method

Electron source for a free electron laser

Lithographic method

Membranes for use within a lithographic apparatus and a lithographi...

Electron injector and free electron laser

Lithographic apparatus

Method and apparatus for generating radiation

Undulator

Radiation source

Lithographic method

Radiation source-collector and method for manufacture

Electron injector and free electron laser

Patents Applicationslast 30 patents

A CLEANING METHOD AND ASSOCIATED ILLUMINATION SOURCE METROLOGY APPA...

APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM

APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT

MEMBRANE CLEANING APPARATUS

MEMBRANE FOR EUV LITHOGRAPHY

MEMBRANE CLEANING APPARATUS

APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY

LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...

A LITHOGRAPHIC APPARATUS

PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

METHOD FOR PROVIDING A WEAR-RESISTANT MATERIAL ON A BODY, AND COMPO...

APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD O...

MEMBRANE CLEANING APPARATUS

AN OBJECT IN A LITHOGRAPHIC APPARATUS

TRANSMISSIVE DIFFUSOR

RADIOISOTOPE PRODUCTION

A LITHOGRAPHIC APPARATUS COMPRISING AN OBJECT WITH AN UPPER LAYER H...

MEMBRANE FOR EUV LITHOGRAPHY

END FACET PROTECTION FOR A RADIATION SOURCE AND A METHOD FOR USE IN...

INSPECTION SYSTEM, LITHOGRAPHIC APPARATUS, AND INSPECTION METHOD

COOLING APPARATUS AND PLASMA-CLEANING STATION FOR COOLING APPARATUS

Component for Use in a Patterning Device Environment

SENSOR MARK AND A METHOD OF MANUFACTURING A SENSOR MARK

LITHOGRAPHIC METHOD

A MEMBRANE FOR EUV LITHOGRAPHY

Radioisotope Production

Electron Source for a Free Electron Laser

LITHOGRAPHIC METHOD

Electron Injector and Free Electron Laser