Andrey E. Yakshin

Person

Nieuwegein, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Reflective optical element
- Patent number 10,916,356
- Issue date Feb 9, 2021
- Carl Zeiss SMT GmbH
- Dmitry Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Processes and device for the deposition of films on substrates
- Patent number 8,475,635
- Issue date Jul 2, 2013
- Carl Zeiss SMT GmbH
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflective optical element for EUV lithography device
- Patent number 8,144,830
- Issue date Mar 27, 2012
- Carl Zeiss GmbH
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processes and device for the deposition of films on substrates
- Patent number 8,025,777
- Issue date Sep 27, 2011
- Carl Zeiss SMT GmbH
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer system with protecting layer system and production method
- Patent number 7,261,957
- Issue date Aug 28, 2007
- Carl Zeiss SMT AG
- Frederik Bijkerk
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element and method for its manufacture as well as lithograp...
- Patent number 7,172,788
- Issue date Feb 6, 2007
- Carl Zeiss SMT AG
- Andrey E. Yakshin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Multilayer system with protecting layer system and production method
- Patent number 6,656,575
- Issue date Dec 2, 2003
- Carl-Zeiss-Stiftung
- Frederik Bijkerk
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for the production of multi-layer systems
- Patent number 6,483,597
- Issue date Nov 19, 2002
- Carl-Zeiss-Stiftung
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REFLECTIVE OPTICAL ELEMENT
- Publication number 20200027623
- Publication date Jan 23, 2020
- Carl Zeiss SMT GMBH
- Dmitry Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ELEMENT COMPRISING A MULTILAYER COATING, AND OPTICAL ARRANG...
- Publication number 20160116648
- Publication date Apr 28, 2016
- Carl Zeiss SMT GMBH
- Robbert W. E. VAN DE KRUIJS
- G02 - OPTICS
Information Patent Application
PROCESSES AND DEVICE FOR THE DEPOSITION OF FILMS ON SUBSTRATES
- Publication number 20110303529
- Publication date Dec 15, 2011
- Carl Zeiss SMT GMBH
- Andrey E. YAKSHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REGENERATING A SURFACE OF AN OPTICAL ELEMENT IN AN XUV R...
- Publication number 20100171050
- Publication date Jul 8, 2010
- STICHTING VOOR FUNDAMENTEEL ONDERZOEK DER MATERIE
- Frederik Bijkerk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE
- Publication number 20100027107
- Publication date Feb 4, 2010
- Carl Zeiss SMT AG
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESSES AND DEVICE FOR THE DEPOSITION OF FILMS ON SUBSTRATES
- Publication number 20090223812
- Publication date Sep 10, 2009
- Carl Zeiss SMT AG
- Andrey E. YAKSHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20070281109
- Publication date Dec 6, 2007
- Carl Zeiss SMT AG
- Frederik Bijkerk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processes and device for the deposition of films on substrates
- Publication number 20050150758
- Publication date Jul 14, 2005
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Optical broad band element and process for its production
- Publication number 20050111083
- Publication date May 26, 2005
- Andrey E. Yakshin
- G02 - OPTICS
Information Patent Application
Process for manufacturing multilayer systems
- Publication number 20040245090
- Publication date Dec 9, 2004
- Andrey E. Yakshin
- G02 - OPTICS
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20040121134
- Publication date Jun 24, 2004
- Frederik Bijkerk
- G02 - OPTICS
Information Patent Application
Method for coating substrates and mask holder
- Publication number 20040052942
- Publication date Mar 18, 2004
- Frederik Bijkerk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20020012797
- Publication date Jan 31, 2002
- Frederik Bijkerk
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for the production of multi-layer systems
- Publication number 20010038456
- Publication date Nov 8, 2001
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY

Andrey E. Yakshin

Person

Patents Grantslast 30 patents

Reflective optical element

Processes and device for the deposition of films on substrates

Reflective optical element for EUV lithography device

Processes and device for the deposition of films on substrates

Multilayer system with protecting layer system and production method

Optical element and method for its manufacture as well as lithograp...

Multilayer system with protecting layer system and production method

Method for the production of multi-layer systems

Patents Applicationslast 30 patents

REFLECTIVE OPTICAL ELEMENT

OPTICAL ELEMENT COMPRISING A MULTILAYER COATING, AND OPTICAL ARRANG...

PROCESSES AND DEVICE FOR THE DEPOSITION OF FILMS ON SUBSTRATES

METHOD FOR REGENERATING A SURFACE OF AN OPTICAL ELEMENT IN AN XUV R...

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE

PROCESSES AND DEVICE FOR THE DEPOSITION OF FILMS ON SUBSTRATES

Multilayer system with protecting layer system and production method

Processes and device for the deposition of films on substrates

Optical broad band element and process for its production

Process for manufacturing multilayer systems

Multilayer system with protecting layer system and production method

Method for coating substrates and mask holder

Multilayer system with protecting layer system and production method

Method for the production of multi-layer systems