Andrey Kharisov

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Confocal line inspection optical system
- Patent number 9,927,371
- Issue date Mar 27, 2018
- KLA-Tencor Corporation
- Mark S. Wang
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Confocal Line Inspection Optical System
- Publication number 20150369750
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Mark S. Wang
- G02 - OPTICS