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Andrey Mikhailovich Yakunin
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Eindhoven, NL
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last 30 patents
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Patent Grant
Spectral purity filters for use in a lithographic apparatus
Patent number
9,041,912
Issue date
May 26, 2015
ASML Netherlands B.V.
Wouter Anthon Soer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Spectral purity filters for use in a lithographic apparatus
Patent number
8,390,788
Issue date
Mar 5, 2013
ASML Netherlands B.V.
Wouter Anthon Soer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Spectral Purity Filters for Use in a Lithographic Apparatus
Publication number
20130010363
Publication date
Jan 10, 2013
ASML NETHERLANDS B.V.
Wouter Anthon Soer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Application
SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS
Publication number
20110044425
Publication date
Feb 24, 2011
ASML NETHERLANDS B.V.
Martin Jacobus Johan Jak
G02 - OPTICS
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Patent Application
Spectral Purity Filters for Use in a Lithographic Apparatus
Publication number
20100020304
Publication date
Jan 28, 2010
ASML NETHERLANDS B.V.
Wouter Anthon Soer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY