Andrey Stepanov

Person

Moscow, RU

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for pumping laser sustained plasma with an illumi...
- Patent number 11,921,297
- Issue date Mar 5, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma light source with reverse vortex flow
- Patent number 11,776,804
- Issue date Oct 3, 2023
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma light source with gas vortex flow
- Patent number 11,690,162
- Issue date Jun 27, 2023
- KLA Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for EUV mask inspection
- Patent number 11,635,700
- Issue date Apr 25, 2023
- Erel Milshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rotating lamp for laser-sustained plasma illumination source
- Patent number 11,596,048
- Issue date Feb 28, 2023
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for pumping laser sustained plasma with an illumi...
- Patent number 11,262,591
- Issue date Mar 1, 2022
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SWIRLER FOR LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX...
- Publication number 20230053035
- Publication date Feb 16, 2023
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX FLOW
- Publication number 20220344146
- Publication date Oct 27, 2022
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for EUV Mask Inspection
- Publication number 20220260928
- Publication date Aug 18, 2022
- KLA Corporation
- Erel Milshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMI...
- Publication number 20220187610
- Publication date Jun 16, 2022
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-SUSTAINED PLASMA LIGHT SOURCE WITH GAS VORTEX FLOW
- Publication number 20210321508
- Publication date Oct 14, 2021
- KLA Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE
- Publication number 20210092826
- Publication date Mar 25, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with an Illumi...
- Publication number 20200150445
- Publication date May 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Andrey Stepanov

Person

Patents Grantslast 30 patents

System and method for pumping laser sustained plasma with an illumi...

Laser-sustained plasma light source with reverse vortex flow

Laser-sustained plasma light source with gas vortex flow

Method and apparatus for EUV mask inspection

Rotating lamp for laser-sustained plasma illumination source

System and method for pumping laser sustained plasma with an illumi...

Patents Applicationslast 30 patents

SWIRLER FOR LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX...

LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX FLOW

Method and Apparatus for EUV Mask Inspection

SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMI...

LASER-SUSTAINED PLASMA LIGHT SOURCE WITH GAS VORTEX FLOW

ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE

System and Method for Pumping Laser Sustained Plasma with an Illumi...