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Andrey Ushakov
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Suwon-si, KR
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last 30 patents
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Patent Grant
Apparatus and method to generate plasma
Patent number
7,804,250
Issue date
Sep 28, 2010
Samsung Electronics Co., Ltd.
Andrey Ushakov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma processing apparatus and method thereof
Publication number
20100048003
Publication date
Feb 25, 2010
SAMSUNG ELECTRONICS CO., LTD.
Doug Yong Sung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Deposition Apparatus and Deposition Method Using the Same
Publication number
20100009097
Publication date
Jan 14, 2010
Doug-Yong Sung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma based ion implantation system
Publication number
20080289576
Publication date
Nov 27, 2008
Samsung Electronics Co., Ltd.
Young dong Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD TO GENERATE PLASMA
Publication number
20080061702
Publication date
Mar 13, 2008
Samsung Electronics Co., Ltd.
Andrey Ushakov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION ANALYSIS SYSTEM BASED ON ANALYZER OF ION ENERGY DISTRIBUTION US...
Publication number
20080032427
Publication date
Feb 7, 2008
Samsung Electronics Co., Ltd.
Yung Hee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High density plasma chemical vapor deposition apparatus
Publication number
20060196420
Publication date
Sep 7, 2006
Andrey Ushakov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...