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Andy Zott
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Gerstetten, DE
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Patents Grants
last 30 patents
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Patent Grant
Image sensor, position sensor device, lithography system, and metho...
Patent number
11,262,660
Issue date
Mar 1, 2022
Carl Zeiss SMT GmbH
Jan Horn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for characterizing a wafer patterned using at lea...
Patent number
10,509,330
Issue date
Dec 17, 2019
Carl Zeiss SMT GmbH
Hans-Michael Stiepan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR ASCERTAINING A DISTANCE TO AN OBJECT
Publication number
20210026017
Publication date
Jan 28, 2021
Carl-Zeiss AG
Vladimir DAVYDENKO
G01 - MEASURING TESTING
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Patent Application
IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHO...
Publication number
20200363731
Publication date
Nov 19, 2020
Carl Zeiss SMT GMBH
Jan Horn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR CHARACTERIZING A WAFER PATTERNED USING AT LEA...
Publication number
20180203369
Publication date
Jul 19, 2018
Carl Zeiss SMT GMBH
Hans-Michael Stiepan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY