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Angela Lee
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Method for depositing amorphous silicon thin films onto large area...
Patent number
6,444,277
Issue date
Sep 3, 2002
Applied Materials, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for multilayer CVD processing in a single chamber
Patent number
6,338,874
Issue date
Jan 15, 2002
Applied Materials, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-step chemical vapor deposition method for thin film transistors
Patent number
5,567,476
Issue date
Oct 22, 1996
Applied Komatsu Technology, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-step chemical vapor deposition method for thin film transistors
Patent number
5,441,768
Issue date
Aug 15, 1995
Applied Materials, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma CVD of silicon nitride thin films on large area glass substr...
Patent number
5,399,387
Issue date
Mar 21, 1995
Applied Materials, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of limiting sticking of body to susceptor in a deposition tr...
Patent number
5,380,566
Issue date
Jan 10, 1995
Applied Materials, Inc.
Robert Robertson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...