Anh-Kiet Quang Phan

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods for high temperature etching a high-K material gate structure
- Patent number 8,501,626
- Issue date Aug 6, 2013
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR HIGH TEMPERATURE ETCHING A HIGH-K GATE STRUCTURE
- Publication number 20130344701
- Publication date Dec 26, 2013
- Wei LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR HIGH TEMPERATURE ETCHING A HIGH-K MATERIAL GATE STRUCTURE
- Publication number 20090004870
- Publication date Jan 1, 2009
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS