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Langebrueck, DE
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last 30 patents
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Patent Grant
Apparatus and method for monitoring trench profiles and for spectro...
Patent number
7,372,579
Issue date
May 13, 2008
Infineon Technologies, AG
Zhen-Long Chen
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Apparatus and method for monitoring trench profiles and for spectro...
Publication number
20070247634
Publication date
Oct 25, 2007
Zhen-Long Chen
G01 - MEASURING TESTING