Ann C. Westerheim

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Westford, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electromigration-resistant via structure
- Patent number 6,096,637
- Issue date Aug 1, 2000
- Compaq Computer Corporation
- Tirunelveli S. Sriram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methodology for in situ etch stop detection and control of plasma e...
- Patent number 5,788,869
- Issue date Aug 4, 1998
- Digital Equipment Corporation
- Timothy J. Dalton
- B24 - GRINDING POLISHING