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Ann Chien
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Taipei, TW
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Patents Grants
last 30 patents
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Patent Grant
Method of processing substrates
Patent number
6,921,493
Issue date
Jul 26, 2005
Lam Research Corporation
Ann Chien
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Applications of oxide hardmasking in metal dry etch processors
Publication number
20020192957
Publication date
Dec 19, 2002
LAM RESEARCH CORPORATION
Ann Chien
H01 - BASIC ELECTRIC ELEMENTS