Ann Erickson

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chuck for plasma processing chamber
- Patent number 12,131,890
- Issue date Oct 29, 2024
- Lam Research Corporation
- Ann Erickson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORTS INCLUDING BONDING LAYERS WITH STUD ARRAYS FOR SU...
- Publication number 20230105556
- Publication date Apr 6, 2023
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...
- Publication number 20220380894
- Publication date Dec 1, 2022
- Keith GAFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20220285136
- Publication date Sep 8, 2022
- LAM RESEARCH CORPORATION
- Hui Ling HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE COATING TREATMENT
- Publication number 20220186354
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Ann ERICKSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK SYSTEM
- Publication number 20220181127
- Publication date Jun 9, 2022
- LAM RESEARCH CORPORATION
- Ann ERICKSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCK FOR PLASMA PROCESSING CHAMBER
- Publication number 20220139681
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- Ann ERICKSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...
- Publication number 20180148835
- Publication date May 31, 2018
- LAM RESEARCH CORPORATION
- Ann Erickson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ann Erickson

Person

Patents Grantslast 30 patents

Chuck for plasma processing chamber

Patents Applicationslast 30 patents

SUBSTRATE SUPPORTS INCLUDING BONDING LAYERS WITH STUD ARRAYS FOR SU...

SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...

EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS

SURFACE COATING TREATMENT

ELECTROSTATIC CHUCK SYSTEM

CHUCK FOR PLASMA PROCESSING CHAMBER

SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...