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Anna Golotsvan
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Qiryat Tivon, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Multiple-tool parameter set calibration and misregistration measure...
Patent number
11,862,521
Issue date
Jan 2, 2024
KLA Corporation
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite overlay metrology target
Patent number
11,809,090
Issue date
Nov 7, 2023
KLA Corporation
Anna Golotsvan
G01 - MEASURING TESTING
Information
Patent Grant
Multi-resolution overlay metrology targets
Patent number
11,726,410
Issue date
Aug 15, 2023
KLA Corporation
Eitan Hajaj
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fab management with dynamic sampling plans, optimized wafer measure...
Patent number
11,615,974
Issue date
Mar 28, 2023
KLA Corporation
Amnon Manassen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Enhancing performance of overlay metrology
Patent number
11,592,755
Issue date
Feb 28, 2023
KLA Corporation
Amnon Manassen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Dynamic amelioration of misregistration measurement
Patent number
11,551,980
Issue date
Jan 10, 2023
KLA-Tencor Corporation
Roie Volkovich
G01 - MEASURING TESTING
Information
Patent Grant
Reduction or elimination of pattern placement error in metrology me...
Patent number
11,537,043
Issue date
Dec 27, 2022
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for error reduction for metrology measurements
Patent number
11,353,799
Issue date
Jun 7, 2022
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Data-driven misregistration parameter configuration and measurement...
Patent number
11,353,493
Issue date
Jun 7, 2022
KLA-Tencor Corporation
Shlomit Katz
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...
Publication number
20230099105
Publication date
Mar 30, 2023
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTI-RESOLUTION OVERLAY METROLOGY TARGETS
Publication number
20220334501
Publication date
Oct 20, 2022
KLA Corporation
Eitan Hajaj
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
Publication number
20220317577
Publication date
Oct 6, 2022
KLA Corporation
Amnon Manassen
G02 - OPTICS
Information
Patent Application
Systems and Methods for Measurement of Misregistration and Ameliora...
Publication number
20220307824
Publication date
Sep 29, 2022
KLA Corporation
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Error Reduction for Metrology Measurements
Publication number
20220155693
Publication date
May 19, 2022
KLA Corporation
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE-TOOL PARAMETER SET CALIBRATION AND MISREGISTRATION MEASURE...
Publication number
20210366790
Publication date
Nov 25, 2021
KLA Corporation
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAB MANAGEMENT WITH DYNAMIC SAMPLING PLANS, OPTIMIZED WAFER MEASURE...
Publication number
20210335638
Publication date
Oct 28, 2021
KLA Corporation
Amnon MANASSEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COMPOSITE OVERLAY METROLOGY TARGET
Publication number
20210240089
Publication date
Aug 5, 2021
KLA Corporation
Anna Golotsvan
G01 - MEASURING TESTING
Information
Patent Application
REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...
Publication number
20210149296
Publication date
May 20, 2021
KLA-Tencor Corporation
Yoel Feler
G01 - MEASURING TESTING
Information
Patent Application
DATA-DRIVEN MISREGISTRATION PARAMETER CONFIGURATION AND MEASUREMENT...
Publication number
20210011073
Publication date
Jan 14, 2021
KLA-Tencor Corporation
Shlomit Katz
G05 - CONTROLLING REGULATING
Information
Patent Application
DYNAMIC AMELIORATION OF MISREGISTRATION MEASUREMENT
Publication number
20200286794
Publication date
Sep 10, 2020
KLA-Tencor Corporation
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...
Publication number
20190250504
Publication date
Aug 15, 2019
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING