Anne Christine Andresen

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Westensee, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 8,773,639
- Issue date Jul 8, 2014
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20100103400
- Publication date Apr 29, 2010
- Carl Zeiss SMT AG
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY