Anqing Cui

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
ALD cycle time reduction using process chamber lid with tunable pum...
- Patent number 12,054,826
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD cycle time reduction using process chamber lid with tunable pum...
- Patent number 11,767,590
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal process chamber lid with backside pumping
- Patent number 11,715,667
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal process chamber lid with backside pumping
- Patent number 11,335,591
- Issue date May 17, 2022
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition chamber with thermal lid
- Patent number 10,407,771
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone resistive heater
- Patent number 9,892,941
- Issue date Feb 13, 2018
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD apparatus for improved film thickness non-uniformity and partic...
- Patent number 9,312,154
- Issue date Apr 12, 2016
- Applied Materials, Inc.
- Binh Tran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor with a ceiling electrode supply conduit having a suc...
- Patent number 9,202,674
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Olkan Cuvalci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with substrate heater and symmetric RF return
- Patent number 8,618,446
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Yu Chang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Multi-zone resistive heater
- Patent number 6,617,553
- Issue date Sep 9, 2003
- Applied Materials, Inc.
- Henry Ho
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUM...
- Publication number 20230357927
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING
- Publication number 20230335434
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING
- Publication number 20220246471
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM AND METHOD OF CONTROLLING CONDUCTANCE IN A PROCES...
- Publication number 20210404059
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Muhammad M. RASHEED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEQUENTIAL PULSE AND PURGE FOR ALD PROCESSES
- Publication number 20210262092
- Publication date Aug 26, 2021
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUM...
- Publication number 20210087686
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING
- Publication number 20200381295
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
- Publication number 20160097119
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- ANQING CUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN
- Publication number 20130001215
- Publication date Jan 3, 2013
- Applied Materials, Inc.
- YU CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CVD APPARATUS FOR IMPROVED FILM THICKNESS NON-UNIFORMITY AND PARTIC...
- Publication number 20100294199
- Publication date Nov 25, 2010
- Applied Materials, Inc.
- BINH TRAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUC...
- Publication number 20100096085
- Publication date Apr 22, 2010
- Applied Materials, Inc.
- OLKAN CUVALCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Zone Resistive Heater
- Publication number 20090314762
- Publication date Dec 24, 2009
- Applied Materials, Inc.
- Anqing Cui
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE HEATING METHOD AND APPARATUS
- Publication number 20080197125
- Publication date Aug 21, 2008
- Applied Materials, Inc.
- ANQING CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-zone resistive heater
- Publication number 20070125762
- Publication date Jun 7, 2007
- APPLIED MATERIALS, INC.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-zone resistive heater
- Publication number 20030062359
- Publication date Apr 3, 2003
- Henry Ho
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

ALD cycle time reduction using process chamber lid with tunable pum...

ALD cycle time reduction using process chamber lid with tunable pum...

Thermal process chamber lid with backside pumping

Thermal process chamber lid with backside pumping

Atomic layer deposition chamber with thermal lid

Multi-zone resistive heater

CVD apparatus for improved film thickness non-uniformity and partic...

Plasma reactor with a ceiling electrode supply conduit having a suc...

Substrate support with substrate heater and symmetric RF return

Multi-zone resistive heater

Patents Applicationslast 30 patents

ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUM...

THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING

THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING

PROCESSING SYSTEM AND METHOD OF CONTROLLING CONDUCTANCE IN A PROCES...

SEQUENTIAL PULSE AND PURGE FOR ALD PROCESSES

ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUM...

THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING

ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID

SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN

CVD APPARATUS FOR IMPROVED FILM THICKNESS NON-UNIFORMITY AND PARTIC...

PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUC...

Multi-Zone Resistive Heater

SUBSTRATE HEATING METHOD AND APPARATUS

Multi-zone resistive heater

Multi-zone resistive heater