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Patents Grantslast 30 patents

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Apparatus for liquid treatment of wafer shaped articles and heating...
- Patent number 9,685,358
- Issue date Jun 20, 2017
- Lam Research AG
- Ante Plazonic
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles and heating...
- Patent number 9,245,777
- Issue date Jan 26, 2016
- Lam Research AG
- Ante Plazonic
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Device and method for processing wafer shaped articles
- Patent number 8,899,246
- Issue date Dec 2, 2014
- Lam Research AG
- Ante Plazonic
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR DETECTING UNDESIRABLE DYNAMIC BEHAVIOR OF L...
- Publication number 20180337069
- Publication date Nov 22, 2018
- LAM RESEARCH AG
- Dipl. -Ing. Dr.techn. Felix Staudegger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...
- Publication number 20160118278
- Publication date Apr 28, 2016
- LAM RESEARCH AG
- Ante Plazonic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...
- Publication number 20140339215
- Publication date Nov 20, 2014
- LAM RESEARCH AG
- Ante PLAZONIC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PROCESSING WAFER SHAPED ARTICLES
- Publication number 20130125379
- Publication date May 23, 2013
- LAM RESEARCH AG
- Ante PLAZONIC
- H01 - BASIC ELECTRIC ELEMENTS