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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,289,498
Issue date
Oct 16, 2012
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100002207
Publication date
Jan 7, 2010
ASML NETHERLANDS B.V.
Erik Roelof LOOPSTRA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY