Anthony de la Llera

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Union City, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for applying downward force on wafer during CMP
- Publication number 20040161939
- Publication date Aug 19, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Application
Air platen for leading edge and trailing edge control
- Publication number 20030119433
- Publication date Jun 26, 2003
- Anthony de la Llera
- B24 - GRINDING POLISHING