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Anthony Dela Llera
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San Jose, CA, US
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last 30 patents
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Patent Grant
Multi zone gas injection upper electrode system
Patent number
10,622,195
Issue date
Apr 14, 2020
Lam Research Corporation
Ryan Bise
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING
Publication number
20190244793
Publication date
Aug 8, 2019
LAM RESEARCH CORPORATION
Zhigang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Multi Zone Gas Injection Upper Electrode System
Publication number
20130126486
Publication date
May 23, 2013
Ryan Bise
H01 - BASIC ELECTRIC ELEMENTS