Anthony Garetto

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for EUV mask blank buried defect analysis
- Patent number 10,055,833
- Issue date Aug 21, 2018
- Carl Zeiss SMT GmbH
- Jan Hendrik Peters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for analyzing a photomask
- Patent number 9,261,775
- Issue date Feb 16, 2016
- Carl Zeiss SMS GmbH
- Anthony Garetto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING A MASK FOR THE EXTREME ULTRAVIOLET WAVELENGTH...
- Publication number 20170176851
- Publication date Jun 22, 2017
- Carl Zeiss SMT GMBH
- Jan-Hendrik Peters
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method and System for EUV Mask Blank Buried Defect Analysis
- Publication number 20160169816
- Publication date Jun 16, 2016
- Carl Zeiss SMT GMBH
- Jan Hendrik Peters
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ANALYZING A PHOTOMASK
- Publication number 20140254915
- Publication date Sep 11, 2014
- Anthony Garetto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY