Anthony J. Toprac

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining optimal photolithography overlay targets bas...
- Patent number 7,200,459
- Issue date Apr 3, 2007
- Advanced Micro Devices, Inc.
- Christopher Allen Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Run to run control process for controlling critical dimensions
- Patent number RE39518
- Issue date Mar 13, 2007
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- 438 - Semiconductor device manufacturing: process
Information Patent Grant
Method and apparatus for data stackification for run-to-run control
- Patent number 7,181,354
- Issue date Feb 20, 2007
- Advanced Micro Devices, Inc.
- Christopher A. Bone
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for initializing tool controllers based on too...
- Patent number 7,103,439
- Issue date Sep 5, 2006
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Adaptive sampling method for improved control in semiconductor manu...
- Patent number 6,988,017
- Issue date Jan 17, 2006
- Advanced Micro Devices, Inc.
- Alexander James Pasadyn
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for updating control state variables of a proc...
- Patent number 6,970,757
- Issue date Nov 29, 2005
- Advanced Micro Devices, Inc.
- Joyce S. Oey Hewett
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for controlling process target values based on...
- Patent number 6,937,914
- Issue date Aug 30, 2005
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for distinguishing between sources of process...
- Patent number 6,901,340
- Issue date May 31, 2005
- Advanced Micro Devices, Inc.
- Alexander J. Pasadyn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for chemical-mechanical polish control in semiconductor manu...
- Patent number 6,884,147
- Issue date Apr 26, 2005
- Yield Dynamics, Inc.
- Anthony J. Toprac
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for integrating multiple process controllers
- Patent number 6,801,817
- Issue date Oct 5, 2004
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for incorporating control simulation environment
- Patent number 6,802,045
- Issue date Oct 5, 2004
- Advanced Micro Devices, Inc.
- Thomas J. Sonderman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of using control models for data compression
- Patent number 6,789,052
- Issue date Sep 7, 2004
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Automated variation of stepper exposure dose based upon across wafe...
- Patent number 6,784,001
- Issue date Aug 31, 2004
- Advanced Micro Devices, Inc.
- Joyce S. Oey Hewett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for adaptively scheduling tool maintenance
- Patent number 6,785,586
- Issue date Aug 31, 2004
- Advanced Micro Devices, Inc.
- Anthony J. Toprac
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of controlling the duration of an endpoint polishing process...
- Patent number 6,746,958
- Issue date Jun 8, 2004
- Advanced Micro Devices, Inc.
- Joyce S. Oey Hewett
- B24 - GRINDING POLISHING
Information Patent Grant
Method for relating photolithography overlay target damage and chem...
- Patent number 6,741,903
- Issue date May 25, 2004
- Adavanced Micro Devices, Inc.
- Christopher Allen Bode
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for using a dynamic control model to compensat...
- Patent number 6,725,121
- Issue date Apr 20, 2004
- Advanced Micro Devices, Inc.
- Alexander J. Pasadyn
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for controlling wafer uniformity using spatial...
- Patent number 6,706,541
- Issue date Mar 16, 2004
- Advanced Micro Devices, Inc.
- Anthony J. Toprac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for prioritizing production lots based on grade estimates an...
- Patent number 6,699,727
- Issue date Mar 2, 2004
- Advanced Micro Devices Inc.
- Anthony J. Toprac
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of data compression using principal components analysis
- Patent number 6,675,137
- Issue date Jan 6, 2004
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method and apparatus for controlling the flow of wafers through a p...
- Patent number 6,675,058
- Issue date Jan 6, 2004
- Advanced Micro Devices, Inc.
- Alexander J. Pasadyn
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for using scatterometry to perform feedback an...
- Patent number 6,643,557
- Issue date Nov 4, 2003
- Advanced Micro Devices, Inc.
- Michael L. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated method of controlling critical dimensions of features by...
- Patent number 6,632,692
- Issue date Oct 14, 2003
- Advanced Micro Devices, Inc.
- Joyce S. Oey Hewett
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated process monitoring and analysis system for semiconductor...
- Patent number 6,622,059
- Issue date Sep 16, 2003
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for run-to-run controlling of overlay registra...
- Patent number 6,622,061
- Issue date Sep 16, 2003
- Advanced Micro Devices, Inc.
- Anthony J. Toprac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling a tool using a baseline contro...
- Patent number 6,615,098
- Issue date Sep 2, 2003
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for performing run-to-run control in a batch m...
- Patent number 6,607,926
- Issue date Aug 19, 2003
- Advanced Micro Devices, Inc.
- Anthony J. Toprac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling chemical mechanical polishing operations to c...
- Patent number 6,595,830
- Issue date Jul 22, 2003
- Advanced Micro Devices, Inc.
- Joyce S. Oey Hewett
- B24 - GRINDING POLISHING
Information Patent Grant
Method of determining etch endpoint using principal components anal...
- Patent number 6,582,618
- Issue date Jun 24, 2003
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Determining endpoint in etching processes using real-time principal...
- Patent number 6,564,114
- Issue date May 13, 2003
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
Adaptive sampling method for improved control in semiconductor manu...
- Publication number 20050221514
- Publication date Oct 6, 2005
- Advanced Micro Devices, Inc.
- Alexander James Pasadyn
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR CHEMICAL-MECHANICAL POLISH CONTROL IN SEMICONDUCTOR MANU...
- Publication number 20040198180
- Publication date Oct 7, 2004
- Anthony J. Toprac
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for controlling a stepper
- Publication number 20020186358
- Publication date Dec 12, 2002
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for controlling feature critical dimensions ba...
- Publication number 20020177245
- Publication date Nov 28, 2002
- Thomas J. Sonderman
- G01 - MEASURING TESTING
Information Patent Application
Automated variation of stepper exposure dose based upon across wafe...
- Publication number 20020098605
- Publication date Jul 25, 2002
- Advanced Micro Devices, Inc.
- Joyce S. Oey Hewett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for control of semiconductor processing for re...
- Publication number 20020069349
- Publication date Jun 6, 2002
- Anthony J. Toprac
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for controlling a stepper
- Publication number 20020064719
- Publication date May 30, 2002
- Anthony John Toprac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Anthony J. Toprac

Person

Patents Grantslast 30 patents

Method for determining optimal photolithography overlay targets bas...

Run to run control process for controlling critical dimensions

Method and apparatus for data stackification for run-to-run control

Method and apparatus for initializing tool controllers based on too...

Adaptive sampling method for improved control in semiconductor manu...

Method and apparatus for updating control state variables of a proc...

Method and apparatus for controlling process target values based on...

Method and apparatus for distinguishing between sources of process...

Method for chemical-mechanical polish control in semiconductor manu...

Method and apparatus for integrating multiple process controllers

Method and apparatus for incorporating control simulation environment

Method of using control models for data compression

Automated variation of stepper exposure dose based upon across wafe...

Method and apparatus for adaptively scheduling tool maintenance

Method of controlling the duration of an endpoint polishing process...

Method for relating photolithography overlay target damage and chem...

Method and apparatus for using a dynamic control model to compensat...

Method and apparatus for controlling wafer uniformity using spatial...

Method for prioritizing production lots based on grade estimates an...

Method of data compression using principal components analysis

Method and apparatus for controlling the flow of wafers through a p...

Method and apparatus for using scatterometry to perform feedback an...

Automated method of controlling critical dimensions of features by...

Automated process monitoring and analysis system for semiconductor...

Method and apparatus for run-to-run controlling of overlay registra...

Method and apparatus for controlling a tool using a baseline contro...

Method and apparatus for performing run-to-run control in a batch m...

Method of controlling chemical mechanical polishing operations to c...

Method of determining etch endpoint using principal components anal...

Determining endpoint in etching processes using real-time principal...

Patents Applicationslast 30 patents

Adaptive sampling method for improved control in semiconductor manu...

METHOD FOR CHEMICAL-MECHANICAL POLISH CONTROL IN SEMICONDUCTOR MANU...

Method and apparatus for controlling a stepper

Method and apparatus for controlling feature critical dimensions ba...

Automated variation of stepper exposure dose based upon across wafe...

Method and apparatus for control of semiconductor processing for re...

Method and apparatus for controlling a stepper