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Anthony L. Bartels
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Phoenix, AZ, US
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last 30 patents
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Patent Grant
Methods for the in-process detection of workpieces in a CMP environ...
Patent number
5,993,289
Issue date
Nov 30, 1999
SpeedFam-IPEC Corporation
Robert F. Allen
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods for the in-process detection of workpieces with a monochrom...
Patent number
5,961,369
Issue date
Oct 5, 1999
SpeedFam-IPEC Corp.
Anthony L. Bartels
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for the in-process detection of workpieces wi...
Patent number
5,834,645
Issue date
Nov 10, 1998
Speedfam Corporation
Anthony Bartels
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for the in-process detection of workpieces with a monochr...
Patent number
5,823,853
Issue date
Oct 20, 1998
Speedfam Corporation
Anthony L. Bartels
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus for the in-process detection of workpieces in a CMP envir...
Patent number
5,733,171
Issue date
Mar 31, 1998
Speedfam Corporation
Robert F. Allen
G05 - CONTROLLING REGULATING