Anthony M. Ledger

Person

New Fairfield, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for moving an article relative to and between...
- Patent number 6,242,926
- Issue date Jun 5, 2001
- Ipec Precision, Inc.
- George J. Gardopee
- G01 - MEASURING TESTING
Information Patent Grant
Automatic rejection of diffraction effects in thin film metrology
- Patent number 5,555,474
- Issue date Sep 10, 1996
- Integrated Process Equipment Corp.
- Anthony M. Ledger
- G01 - MEASURING TESTING
Information Patent Grant
Transparent optical chuck incorporating optical monitoring
- Patent number 5,515,167
- Issue date May 7, 1996
- Hughes Aircraft Company
- Anthony Ledger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate thickness measurement using oblique incidence multispectr...
- Patent number 5,502,564
- Issue date Mar 26, 1996
- Hughes Aircraft Company
- Anthony Ledger
- G01 - MEASURING TESTING
Information Patent Grant
Film thickness measurement of structures containing a scattering su...
- Patent number 5,452,953
- Issue date Sep 26, 1995
- Hughes Aircraft Company
- Anthony M. Ledger
- G01 - MEASURING TESTING
Information Patent Grant
Cofocal optical system for thickness measurements of patterned wafers
- Patent number 5,436,725
- Issue date Jul 25, 1995
- Hughes Aircraft Company
- Anthony M. Ledger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for thick wafer measurement
- Patent number 5,386,119
- Issue date Jan 31, 1995
- Hughes Aircraft Company
- Anthony Ledger
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring the thickness of thin films
- Patent number 5,365,340
- Issue date Nov 15, 1994
- Hughes Aircraft Company
- Anthony M. Ledger
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for interferometrically measuring the thicknes...
- Patent number 5,333,049
- Issue date Jul 26, 1994
- Hughes Aircraft Company
- Anthony M. Ledger
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for performing thin film layer thickness metro...
- Patent number 5,293,214
- Issue date Mar 8, 1994
- Hughes Aircraft Company
- Anthony M. Ledger
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for performing thin film layer thickness metro...
- Patent number 5,291,269
- Issue date Mar 1, 1994
- Hughes Aircraft Company
- Anthony M. Ledger
- G01 - MEASURING TESTING

Anthony M. Ledger

Person

Patents Grantslast 30 patents

Method and apparatus for moving an article relative to and between...

Automatic rejection of diffraction effects in thin film metrology

Transparent optical chuck incorporating optical monitoring

Substrate thickness measurement using oblique incidence multispectr...

Film thickness measurement of structures containing a scattering su...

Cofocal optical system for thickness measurements of patterned wafers

Apparatus and method for thick wafer measurement

Apparatus and method for measuring the thickness of thin films

Apparatus and method for interferometrically measuring the thicknes...

Apparatus and method for performing thin film layer thickness metro...

Apparatus and method for performing thin film layer thickness metro...