Anthony O'Hara

Person

Lothian, GB

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a microstructure
- Patent number 12,358,784
- Issue date Jul 15, 2025
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vapour etch of silicon dioxide with improved selectivity
- Patent number 10,354,884
- Issue date Jul 16, 2019
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selectivity in a xenon difluoride etch process
- Patent number 10,173,894
- Issue date Jan 8, 2019
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching a sacrificial silicon oxide layer
- Patent number 8,679,354
- Issue date Mar 25, 2014
- Memsstar Limited
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for monitoring a microstructure etching process
- Patent number 7,672,750
- Issue date Mar 2, 2010
- Point 35 Microstructures Ltd.
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20240239649
- Publication date Jul 18, 2024
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20220388837
- Publication date Dec 8, 2022
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVITY IN A XENON DIFLUORIDE ETCH PROCESS
- Publication number 20180029883
- Publication date Feb 1, 2018
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEPOSITION TECHNIQUE FOR DEPOSITING A COATING ON A DEVICE
- Publication number 20140308822
- Publication date Oct 16, 2014
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VAPOUR ETCH OF SILICON DIOXIDE WITH IMPROVED SELECTIVITY
- Publication number 20140017901
- Publication date Jan 16, 2014
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING A SACRIFICIAL SILICON OXIDE LAYER
- Publication number 20090308843
- Publication date Dec 17, 2009
- POINT 35 MICROSTRUCTURES LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring A Microstructure Etching Process
- Publication number 20080147229
- Publication date Jun 19, 2008
- POINT 35 MICROSTRUCTURES LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for the Etching of Microstructures
- Publication number 20080035607
- Publication date Feb 14, 2008
- Anthony O'Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Anthony O'Hara

Person

Patents Grantslast 30 patents

Method of manufacturing a microstructure

Vapour etch of silicon dioxide with improved selectivity

Selectivity in a xenon difluoride etch process

Method of etching a sacrificial silicon oxide layer

Method and apparatus for monitoring a microstructure etching process

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING A MICROSTRUCTURE

METHOD OF MANUFACTURING A MICROSTRUCTURE

SELECTIVITY IN A XENON DIFLUORIDE ETCH PROCESS

DEPOSITION TECHNIQUE FOR DEPOSITING A COATING ON A DEVICE

VAPOUR ETCH OF SILICON DIOXIDE WITH IMPROVED SELECTIVITY

METHOD OF ETCHING A SACRIFICIAL SILICON OXIDE LAYER

Method And Apparatus For Monitoring A Microstructure Etching Process

Method and Apparatus for the Etching of Microstructures