Anthony Renau

Person

West Newbury, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and techniques for substrate processing using independent...
- Patent number 11,996,266
- Issue date May 28, 2024
- Applied Materials, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods using an inline surface engineering source
- Patent number 11,862,433
- Issue date Jan 2, 2024
- Varlan Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme edge uniformity control
- Patent number 11,574,800
- Issue date Feb 7, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system and method for energy spread ion beam
- Patent number 11,569,063
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Paul J. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, apparatus and method for bunched ribbon ion beam
- Patent number 11,217,427
- Issue date Jan 4, 2022
- Applied Materials, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods using an inline surface engineering source
- Patent number 11,069,511
- Issue date Jul 20, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Performance improvement of EUV photoresist by ion implantation
- Patent number 10,990,014
- Issue date Apr 27, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gate all around device and method of formation using angled ions
- Patent number 10,930,735
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Min Gyu Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate devices and methods of formation using angled ions
- Patent number 10,903,211
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device structure for forming semiconductor device having angled con...
- Patent number 10,886,279
- Issue date Jan 5, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device structure for forming semiconductor device having angled con...
- Patent number 10,692,872
- Issue date Jun 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme edge uniformity control
- Patent number 10,665,433
- Issue date May 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate all around device and method of formation using angled ions
- Patent number 10,607,847
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Min Gyu Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Performance improvement of EUV photoresist by ion implantation
- Patent number 10,545,408
- Issue date Jan 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High brightness ion beam extraction using bias electrodes and magne...
- Patent number 10,290,462
- Issue date May 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High brightness ion beam extraction using bias electrodes and magne...
- Patent number 9,922,795
- Issue date Mar 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively depositing a layer on a three dimensional st...
- Patent number 9,847,228
- Issue date Dec 19, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for generating high current negative hydrogen...
- Patent number 9,773,636
- Issue date Sep 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- W. Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ control of ion angular distribution in a processing apparatus
- Patent number 9,620,335
- Issue date Apr 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Angled ion beam processing of heterogeneous structure
- Patent number 9,520,360
- Issue date Dec 13, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively depositing a layer on a three dimensional st...
- Patent number 9,453,279
- Issue date Sep 27, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for ion implantation of non-planar field effect transistors
- Patent number 9,455,335
- Issue date Sep 27, 2016
- Varian Semiconductor Equiment Associates, Inc
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of affecting material properties and applications therefor
- Patent number 9,425,027
- Issue date Aug 23, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Angled ion beam processing of heterogeneous structure
- Patent number 9,337,040
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ control of ion angular distribution in a processing apparatus
- Patent number 9,293,301
- Issue date Mar 22, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to mitigate straggle damage to sensitive structures
- Patent number 9,236,257
- Issue date Jan 12, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Indirectly heated cathode cartridge design
- Patent number 9,076,625
- Issue date Jul 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Craig Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and apparatus for high rate hydrogen implantation and co...
- Patent number 9,024,282
- Issue date May 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controllably implanting workpieces
- Patent number 8,937,004
- Issue date Jan 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus and method for multiple slot ion implantation
- Patent number 8,716,682
- Issue date May 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339287
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339288
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...
- Publication number 20240297016
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Methods Using An Inline Surface Engineering Source
- Publication number 20240096602
- Publication date Mar 21, 2024
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
- Publication number 20240029997
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Paul J. Murphy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
- Publication number 20220319806
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Paul J. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Methods Using An Inline Surface Engineering Source
- Publication number 20210313154
- Publication date Oct 7, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...
- Publication number 20210166946
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE DEVICES AND METHODS OF FORMATION USING ANGLED IONS
- Publication number 20210050349
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- ANTHONY RENAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...
- Publication number 20200279852
- Publication date Sep 3, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extreme Edge Uniformity Control
- Publication number 20200243308
- Publication date Jul 30, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE ALL AROUND DEVICE AND METHOD OF FORMATION USING ANGLED IONS
- Publication number 20200185228
- Publication date Jun 11, 2020
- Applied Materials, Inc.
- Min Gyu Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION
- Publication number 20200096870
- Publication date Mar 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE STRUCTURE AND TECHNIQUES FOR FORMING SEMICONDUCTOR DEVICE HA...
- Publication number 20200027832
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Methods Using An Inline Surface Engineering Source
- Publication number 20190393019
- Publication date Dec 26, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...
- Publication number 20190181144
- Publication date Jun 13, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION
- Publication number 20190056914
- Publication date Feb 21, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
High Brightness Ion Beam Extraction
- Publication number 20180166250
- Publication date Jun 14, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extreme Edge Uniformity Control
- Publication number 20180082824
- Publication date Mar 22, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR GENERATING HIGH CURRENT NEGATIVE HYDROGEN...
- Publication number 20170053776
- Publication date Feb 23, 2017
- Varian Semiconductor Equipment Associates, Inc.
- W. Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Brightness Ion Beam Extraction
- Publication number 20170032927
- Publication date Feb 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SELECTIVELY DEPOSITING A LAYER ON A THREE DIMENSIONAL ST...
- Publication number 20160379827
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods Of Affecting Material Properties And Applications Therefor
- Publication number 20160326636
- Publication date Nov 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANGLED ION BEAM PROCESSING OF HETEROGENEOUS STRUCTURE
- Publication number 20160233162
- Publication date Aug 11, 2016
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS
- Publication number 20160189935
- Publication date Jun 30, 2016
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SELECTIVELY DEPOSITING A LAYER ON A THREE DIMENSIONAL ST...
- Publication number 20160005607
- Publication date Jan 7, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Simon Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR DIAMOND NUCLEATION CONTROL FOR THIN FILM PROCESSING
- Publication number 20150176116
- Publication date Jun 25, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic GODET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS
- Publication number 20150179409
- Publication date Jun 25, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR ION IMPLANTATION OF NON-PLANAR FIELD EFFECT TRANSISTORS
- Publication number 20150132907
- Publication date May 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES TO MITIGATE STRAGGLE DAMAGE TO SENSITIVE STRUCTURES
- Publication number 20140273502
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Anthony Renau

Person

Patents Grantslast 30 patents

Apparatus and techniques for substrate processing using independent...

System and methods using an inline surface engineering source

Extreme edge uniformity control

Apparatus, system and method for energy spread ion beam

System, apparatus and method for bunched ribbon ion beam

System and methods using an inline surface engineering source

Performance improvement of EUV photoresist by ion implantation

Gate all around device and method of formation using angled ions

Gate devices and methods of formation using angled ions

Device structure for forming semiconductor device having angled con...

Device structure for forming semiconductor device having angled con...

Extreme edge uniformity control

Gate all around device and method of formation using angled ions

Performance improvement of EUV photoresist by ion implantation

High brightness ion beam extraction using bias electrodes and magne...

High brightness ion beam extraction using bias electrodes and magne...

Method for selectively depositing a layer on a three dimensional st...

Apparatus and method for generating high current negative hydrogen...

In situ control of ion angular distribution in a processing apparatus

Angled ion beam processing of heterogeneous structure

Method for selectively depositing a layer on a three dimensional st...

Techniques for ion implantation of non-planar field effect transistors

Methods of affecting material properties and applications therefor

Angled ion beam processing of heterogeneous structure

In situ control of ion angular distribution in a processing apparatus

Techniques to mitigate straggle damage to sensitive structures

Indirectly heated cathode cartridge design

Techniques and apparatus for high rate hydrogen implantation and co...

Apparatus and method for controllably implanting workpieces

Apparatus and method for multiple slot ion implantation

Patents Applicationslast 30 patents

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...

System And Methods Using An Inline Surface Engineering Source

APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM

APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM

System And Methods Using An Inline Surface Engineering Source

APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...

GATE DEVICES AND METHODS OF FORMATION USING ANGLED IONS

DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...

Extreme Edge Uniformity Control

GATE ALL AROUND DEVICE AND METHOD OF FORMATION USING ANGLED IONS

PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION

DEVICE STRUCTURE AND TECHNIQUES FOR FORMING SEMICONDUCTOR DEVICE HA...

System And Methods Using An Inline Surface Engineering Source

DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...

PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION

High Brightness Ion Beam Extraction

Extreme Edge Uniformity Control

APPARATUS AND METHOD FOR GENERATING HIGH CURRENT NEGATIVE HYDROGEN...

High Brightness Ion Beam Extraction

METHOD FOR SELECTIVELY DEPOSITING A LAYER ON A THREE DIMENSIONAL ST...

Methods Of Affecting Material Properties And Applications Therefor

ANGLED ION BEAM PROCESSING OF HETEROGENEOUS STRUCTURE

IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS

METHOD FOR SELECTIVELY DEPOSITING A LAYER ON A THREE DIMENSIONAL ST...

TECHNIQUES FOR DIAMOND NUCLEATION CONTROL FOR THIN FILM PROCESSING

IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS

TECHNIQUES FOR ION IMPLANTATION OF NON-PLANAR FIELD EFFECT TRANSISTORS

TECHNIQUES TO MITIGATE STRAGGLE DAMAGE TO SENSITIVE STRUCTURES