Anthony Yen

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Mask cleaning
- Patent number 11,921,434
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask cleaning
- Patent number 11,740,563
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system with an embedded cleaning module
- Patent number 11,378,894
- Issue date Jul 5, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Chieh Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask cleaning
- Patent number 11,256,179
- Issue date Feb 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography mask with both transmission-type and reflective-type ov...
- Patent number 11,137,684
- Issue date Oct 5, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV vessel inspection method and related system
- Patent number 11,092,555
- Issue date Aug 17, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to mitigate defect printability for ID pattern
- Patent number 11,086,227
- Issue date Aug 10, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Cheng Lu
- G02 - OPTICS
Information Patent Grant
Mask with multilayer structure and manufacturing method by using th...
- Patent number 11,073,755
- Issue date Jul 27, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for performing lithography process in semiconduct...
- Patent number 10,976,672
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet lithography system, device, and method for prin...
- Patent number 10,976,655
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography method with reduced impacts of mask defects
- Patent number 10,955,746
- Issue date Mar 23, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shinn-Sheng Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for EUV mask and fabrication thereof
- Patent number 10,831,094
- Issue date Nov 10, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask with multilayer structure and manufacturing method by using th...
- Patent number 10,747,097
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle fabrication methods and structures thereof
- Patent number 10,747,103
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV vessel inspection method and related system
- Patent number 10,718,718
- Issue date Jul 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet lithography system, device, and method for prin...
- Patent number 10,691,014
- Issue date Jun 23, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to mitigate defect printability for ID pattern
- Patent number 10,684,552
- Issue date Jun 16, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Cheng Lu
- G02 - OPTICS
Information Patent Grant
EUV lithography system and method with optimized throughput and sta...
- Patent number 10,520,823
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle for EUV mask and fabrication thereof
- Patent number 10,520,806
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography mask with both transmission-type and reflective-type ov...
- Patent number 10,514,597
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system with an embedded cleaning module
- Patent number 10,459,353
- Issue date Oct 29, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Chieh Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask cleaning
- Patent number 10,459,352
- Issue date Oct 29, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV vessel inspection method and related system
- Patent number 10,429,314
- Issue date Oct 1, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- G01 - MEASURING TESTING
Information Patent Grant
Pellicle structures and methods of fabricating thereof
- Patent number 10,353,285
- Issue date Jul 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Chang Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV pellicle fabrication methods and structures thereof
- Patent number 10,274,819
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Cheng Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for performing lithography process in semiconduct...
- Patent number 10,274,838
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for integrated circuit patterning
- Patent number 10,276,372
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask with multilayer structure and manufacturing method by using th...
- Patent number 10,168,611
- Issue date Jan 1, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet lithography system, device, and method for prin...
- Patent number 10,162,257
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle fabrication methods and structures thereof
- Patent number 10,162,258
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CALCULATING OPTICAL AERIAL IMAGE
- Publication number 20250116501
- Publication date Apr 10, 2025
- National Tsing-Hua University
- Tsai-Sheng Gau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Mask Cleaning
- Publication number 20230124211
- Publication date Apr 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask Cleaning
- Publication number 20220179326
- Publication date Jun 9, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Method With Reduced Impacts of Mask Defects
- Publication number 20210208505
- Publication date Jul 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shinn-Sheng Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask with Multilayer Structure and Manufacturing Method by Using th...
- Publication number 20200379335
- Publication date Dec 3, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM
- Publication number 20200348241
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis CHANG
- G01 - MEASURING TESTING
Information Patent Application
Extreme Ultraviolet Lithography System, Device, and Method for Prin...
- Publication number 20200319545
- Publication date Oct 8, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to Mitigate Defect Printability for ID Pattern
- Publication number 20200310250
- Publication date Oct 1, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Cheng Lu
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY MASK WITH BOTH TRANSMISSION-TYPE AND REFLECTIVE-TYPE OV...
- Publication number 20200124958
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography System With An Embedded Cleaning Module
- Publication number 20200064747
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Chieh Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask Cleaning
- Publication number 20200050118
- Publication date Feb 13, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pellicle for EUV Mask and Fabrication Thereof
- Publication number 20200050100
- Publication date Feb 13, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM
- Publication number 20200025688
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis CHANG
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING LITHOGRAPHY PROCESS IN SEMICONDUCT...
- Publication number 20190250522
- Publication date Aug 15, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FABRICATION METHODS AND STRUCTURES THEREOF
- Publication number 20190204730
- Publication date Jul 4, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yue LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV Lithography System and Method with Optimized Throughput and Sta...
- Publication number 20190121241
- Publication date Apr 25, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- YEN-CHENG LU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Extreme Ultraviolet Lithography System, Device, and Method for Prin...
- Publication number 20190121228
- Publication date Apr 25, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask with Multilayer Structure and Manufacturing Method by Using th...
- Publication number 20190113835
- Publication date Apr 18, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Method with Reduced Impacts of Mask Defects
- Publication number 20190033720
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shinn-Sheng Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM
- Publication number 20190033225
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis CHANG
- G01 - MEASURING TESTING
Information Patent Application
PELLICLE FOR EUV MASK AND FABRICATION THEREOF
- Publication number 20180341174
- Publication date Nov 29, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE STRUCTURES AND METHODS OF FABRICATING THEREOF
- Publication number 20180292744
- Publication date Oct 11, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Chang LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to Mitigate Defect Printability for ID Pattern
- Publication number 20180253008
- Publication date Sep 6, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Cheng Lu
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM, DEVICE, AND METHOD FOR PRIN...
- Publication number 20180173089
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FABRICATION METHODS AND STRUCTURES THEREOF
- Publication number 20180173092
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Yun-Yue LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE STRUCTURES AND METHODS OF FABRICATING THEREOF
- Publication number 20180173093
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Pei-Cheng HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY MASK WITH BOTH TRANSMISSION-TYPE AND REFLECTIVE-TYPE OV...
- Publication number 20180149959
- Publication date May 31, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REPAIRING A MASK
- Publication number 20170352144
- Publication date Dec 7, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Shinn-Sheng YU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK WITH MULTILAYER STRUCTURE AND MANUFACTURING METHOD BY USING TH...
- Publication number 20170343892
- Publication date Nov 30, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Integrated Circuit Patterning
- Publication number 20170338103
- Publication date Nov 23, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS

Anthony Yen

Person

Patents Grantslast 30 patents

Mask cleaning

Mask cleaning

Lithography system with an embedded cleaning module

Mask cleaning

Lithography mask with both transmission-type and reflective-type ov...

EUV vessel inspection method and related system

Method to mitigate defect printability for ID pattern

Mask with multilayer structure and manufacturing method by using th...

System and method for performing lithography process in semiconduct...

Extreme ultraviolet lithography system, device, and method for prin...

Lithography method with reduced impacts of mask defects

Pellicle for EUV mask and fabrication thereof

Mask with multilayer structure and manufacturing method by using th...

Pellicle fabrication methods and structures thereof

EUV vessel inspection method and related system

Extreme ultraviolet lithography system, device, and method for prin...

Method to mitigate defect printability for ID pattern

EUV lithography system and method with optimized throughput and sta...

Pellicle for EUV mask and fabrication thereof

Lithography mask with both transmission-type and reflective-type ov...

Lithography system with an embedded cleaning module

Mask cleaning

EUV vessel inspection method and related system

Pellicle structures and methods of fabricating thereof

EUV pellicle fabrication methods and structures thereof

System and method for performing lithography process in semiconduct...

Method for integrated circuit patterning

Mask with multilayer structure and manufacturing method by using th...

Extreme ultraviolet lithography system, device, and method for prin...

Pellicle fabrication methods and structures thereof

Patents Applicationslast 30 patents

METHOD OF CALCULATING OPTICAL AERIAL IMAGE

Mask Cleaning

Mask Cleaning

Lithography Method With Reduced Impacts of Mask Defects

Mask with Multilayer Structure and Manufacturing Method by Using th...

EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM

Extreme Ultraviolet Lithography System, Device, and Method for Prin...

Method to Mitigate Defect Printability for ID Pattern

LITHOGRAPHY MASK WITH BOTH TRANSMISSION-TYPE AND REFLECTIVE-TYPE OV...

Lithography System With An Embedded Cleaning Module

Mask Cleaning

Pellicle for EUV Mask and Fabrication Thereof

EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM

SYSTEM AND METHOD FOR PERFORMING LITHOGRAPHY PROCESS IN SEMICONDUCT...

PELLICLE FABRICATION METHODS AND STRUCTURES THEREOF

EUV Lithography System and Method with Optimized Throughput and Sta...

Extreme Ultraviolet Lithography System, Device, and Method for Prin...

Mask with Multilayer Structure and Manufacturing Method by Using th...

Lithography Method with Reduced Impacts of Mask Defects

EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM

PELLICLE FOR EUV MASK AND FABRICATION THEREOF

PELLICLE STRUCTURES AND METHODS OF FABRICATING THEREOF

Method to Mitigate Defect Printability for ID Pattern

EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM, DEVICE, AND METHOD FOR PRIN...

PELLICLE FABRICATION METHODS AND STRUCTURES THEREOF

PELLICLE STRUCTURES AND METHODS OF FABRICATING THEREOF

LITHOGRAPHY MASK WITH BOTH TRANSMISSION-TYPE AND REFLECTIVE-TYPE OV...

METHOD FOR REPAIRING A MASK

MASK WITH MULTILAYER STRUCTURE AND MANUFACTURING METHOD BY USING TH...

Method for Integrated Circuit Patterning