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La Tronche, FR
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Patent Application
METHOD OF FABRICATING AN INERTIAL SENSOR
Publication number
20140024161
Publication date
Jan 23, 2014
TRONIC'S MICROSYSTEMS
Stéphane Renard
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) DEVICE
Publication number
20120267730
Publication date
Oct 25, 2012
TRONICS MICROSYSTEMS S.A.
Stéphane RENARD
B81 - MICRO-STRUCTURAL TECHNOLOGY