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Antoine Gaston Marie Kiers
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Veldhoven, NL
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last 30 patents
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Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
Publication number
20080311344
Publication date
Dec 18, 2008
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
Publication number
20080088854
Publication date
Apr 17, 2008
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Application
Focus determination method, device manufacturing method, and mask
Publication number
20070003840
Publication date
Jan 4, 2007
ASML NETHERLANDS B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20060033921
Publication date
Feb 16, 2006
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING