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Antoine Gaston Marie Kiers
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
8,294,907
Issue date
Oct 23, 2012
ASML Netherlands B.V.
Hugo Augustinus Joseph Cramer
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
8,233,155
Issue date
Jul 31, 2012
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
8,054,467
Issue date
Nov 8, 2011
ASML Netherlands B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
7,916,927
Issue date
Mar 29, 2011
ASML Netherlands B.V.
Hugo Augustinus Joseph Cramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
7,911,612
Issue date
Mar 22, 2011
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
7,791,732
Issue date
Sep 7, 2010
ASML Netherlands B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
7,791,727
Issue date
Sep 7, 2010
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
7,715,019
Issue date
May 11, 2010
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
7,692,792
Issue date
Apr 6, 2010
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
7,630,087
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Leonardus Henricus Marie Verstappen
G01 - MEASURING TESTING
Information
Patent Grant
Method of forming a substrate for use in calibrating a metrology to...
Patent number
7,605,907
Issue date
Oct 20, 2009
ASML Netherlands B.V.
Hugo Augustinus Joseph Cramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method and computer program product
Patent number
7,596,420
Issue date
Sep 29, 2009
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Focus determination method, device manufacturing method, and mask
Patent number
7,532,307
Issue date
May 12, 2009
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
7,532,331
Issue date
May 12, 2009
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for predicting a critical dimension of a feature imaged by a...
Patent number
7,443,486
Issue date
Oct 28, 2008
ASML Netherlands B.V.
Koen Van Ingen Schenau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Test pattern, inspection method, and device manufacturing method
Patent number
7,312,860
Issue date
Dec 25, 2007
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Test pattern, inspection method, and device manufacturing method
Patent number
7,151,594
Issue date
Dec 19, 2006
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device inspection method and apparatus using an asymmetric marker
Patent number
7,112,813
Issue date
Sep 26, 2006
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
Publication number
20120038929
Publication date
Feb 16, 2012
ASML NETHERLANDS B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Application
Inspection Apparatus for Lithography
Publication number
20110141444
Publication date
Jun 16, 2011
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20110007314
Publication date
Jan 13, 2011
ASML NETHERLANDS B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Characteristic
Publication number
20100227280
Publication date
Sep 9, 2010
ASML NETHERLANDS B.V.
Johannes Anna Quaedackers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Apparatus, Lithographic Apparatus, Lithographic Processi...
Publication number
20100201963
Publication date
Aug 12, 2010
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph Cramer
G01 - MEASURING TESTING
Information
Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
Publication number
20090237676
Publication date
Sep 24, 2009
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
Publication number
20090135424
Publication date
May 28, 2009
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Application
Method of forming a substrate for use in calibrating a metrology to...
Publication number
20080239277
Publication date
Oct 2, 2008
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph Cramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection method and apparatus,lithographic apparatus, lithographi...
Publication number
20080170780
Publication date
Jul 17, 2008
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph Cramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
Publication number
20080117434
Publication date
May 22, 2008
ASML NETHERLANDS B.V.
Leonardus Henricus, Marie Verstappen
G01 - MEASURING TESTING
Information
Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
Publication number
20080088832
Publication date
Apr 17, 2008
ASML NETHERLANDS B.V.
Hugo Angustinus Joseph Cramer
G01 - MEASURING TESTING
Information
Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
Publication number
20080068616
Publication date
Mar 20, 2008
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20070296973
Publication date
Dec 27, 2007
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G01 - MEASURING TESTING
Information
Patent Application
Device manufacturing method and computer program product
Publication number
20070293973
Publication date
Dec 20, 2007
ASML NETHERLANDS B.V.
Antoine Gaston Marie Kiers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY