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Anton deVilliers
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Clifton Park, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of patterning a substrate using a sidewall spacer etch mask
Patent number
12,099,299
Issue date
Sep 24, 2024
Tokyo Electron Limited
Jodi Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power delivery network for CFET with buried power rails
Patent number
12,040,271
Issue date
Jul 16, 2024
Tokyo Electron Limited
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for threshold voltage tuning through selective deposition of...
Patent number
12,020,990
Issue date
Jun 25, 2024
Tokyo Electron Limited
Jeffrey Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor apparatus having stacked de...
Patent number
12,014,984
Issue date
Jun 18, 2024
Tokyo Electron Limited
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Precision multi-axis photolithography alignment correction using st...
Patent number
12,001,147
Issue date
Jun 4, 2024
Tokyo Electron Limited
Daniel J. Fulford
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for tuning stress transitions of films on a substrate
Patent number
11,990,334
Issue date
May 21, 2024
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing overlay results with absolute reference for se...
Patent number
11,966,171
Issue date
Apr 23, 2024
Tokyo Electron Limited
Anton J. deVilliers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Architecture design and process for manufacturing monolithically in...
Patent number
11,901,360
Issue date
Feb 13, 2024
Tokyo Electron Limited
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for liquid dispense and coverage control
Patent number
11,883,837
Issue date
Jan 30, 2024
Tokyo Electron Limited
Mirko Vukovic
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for die-level unique authentication and serialization of sem...
Patent number
11,862,497
Issue date
Jan 2, 2024
Tokyo Electron Limited
H. Jim Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for pattern reduction using a staircase spacer
Patent number
11,854,806
Issue date
Dec 26, 2023
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for recessing a fill material within openings formed on a pa...
Patent number
11,848,236
Issue date
Dec 19, 2023
Tokyo Electron Limited
Anton deVilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a narrow trench
Patent number
11,841,617
Issue date
Dec 12, 2023
Tokyo Electron Limited
Anton J. Devilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-dimensional vertical switching connections for connecting cir...
Patent number
11,810,854
Issue date
Nov 7, 2023
Tokyo Electron Limited
Mark I. Gardner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning a substrate using a sidewall spacer etch mask
Patent number
11,782,346
Issue date
Oct 10, 2023
Tokyo Electron Limited
Jodi Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for pattern reduction using a staircase spacer
Patent number
11,776,812
Issue date
Oct 3, 2023
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization of spin-on films
Patent number
11,776,808
Issue date
Oct 3, 2023
Tokyo Electron Limited
Anthony R. Schepis
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of 3D logic fabrication to sequentially decrease processing...
Patent number
11,764,113
Issue date
Sep 19, 2023
Tokyo Electron Limited
Jeffrey Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power delivery network for CFET with buried power rails
Patent number
11,735,525
Issue date
Aug 22, 2023
Tokyo Electron Limited
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Localized stress regions for three-dimension chiplet formation
Patent number
11,721,551
Issue date
Aug 8, 2023
Tokyo Electron Limited
Anton J. Devilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making 3D circuits with integrated stacked 3D metal lines...
Patent number
11,721,582
Issue date
Aug 8, 2023
Tokyo Electron Limited
Mark I. Gardner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Programmable connection segment and method of forming the same
Patent number
11,694,957
Issue date
Jul 4, 2023
Tokyo Electron Limited
Mark I. Gardner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Localized stress regions for three-dimension chiplet formation
Patent number
11,688,642
Issue date
Jun 27, 2023
Tokyo Electron Limited
Anton J. Devilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to form narrow slot contacts
Patent number
11,682,559
Issue date
Jun 20, 2023
Tokyo Electron Limited
Michael Murphy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coaxial contacts for 3D logic and memory
Patent number
11,676,968
Issue date
Jun 13, 2023
Tokyo Electron Limited
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of pattern alignment for field stitching
Patent number
11,640,118
Issue date
May 2, 2023
Tokyo Electron Limited
Anton J. deVilliers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Horizontal programmable conducting bridges between conductive lines
Patent number
11,640,937
Issue date
May 2, 2023
Tokyo Electron Limited
H. Jim Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D complementary metal oxide semiconductor (CMOS) device and method...
Patent number
11,631,671
Issue date
Apr 18, 2023
Tokyo Electron Limited
H. Jim Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing overlay results with absolute reference for se...
Patent number
11,630,397
Issue date
Apr 18, 2023
Tokyo Electron Limited
Anton J. deVilliers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Power distribution network for 3D logic and memory
Patent number
11,616,020
Issue date
Mar 28, 2023
Tokyo Electron Limited
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LIGHT EMITTING DIODES AND ASSOCIATED METHODS OF MANUFACTURING
Publication number
20240297269
Publication date
Sep 5, 2024
Micron Technology, Inc.
Scott D. Schellhammer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CELL LAYOUT
Publication number
20240289529
Publication date
Aug 29, 2024
TOKYO ELECTRON LIMITED
Jeffrey Smith
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
THREE-DIMENSIONAL MULTIPLE LOCATION COMPRESSING BONDED ARM-POISEDON...
Publication number
20240203797
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
Andrew WELOTH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR WAFER ALIGNMENT
Publication number
20240203778
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
David POWER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Liquid Dispense and Coverage Control
Publication number
20240042472
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Mirko VUKOVIC
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD OF PATTERNING A SUBSTRATE USING A SIDEWALL SPACER ETCH MASK
Publication number
20230367217
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Jodi GRZESKOWIAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOP-DOWN SELF-ALIGNMENT OF VIAS IN A SEMICONDUCTOR DEVICE FOR SUB-2...
Publication number
20230352343
Publication date
Nov 2, 2023
TOKYO ELECTRON LIMITED
Jeffrey SMITH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID PATTERNING-BONDING SEMICONDUCTOR TOOL
Publication number
20230326814
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CHUCK COMPENSATION VIA WAFER SHAPE CONTROL
Publication number
20230326738
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER DELIVERY NETWORK FOR CFET WITH BURIED POWER RAILS
Publication number
20230326855
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Lars LIEBMANN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER SHAPE CONTROL FOR W2W BONDING
Publication number
20230326767
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO FORM NARROW SLOT CONTACTS
Publication number
20230274940
Publication date
Aug 31, 2023
TOKYO ELECTRON LIMITED
Michael MURPHY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU LITHOGRAPHY PATTERN ENHANCEMENT WITH LOCALIZED STRESS TREAT...
Publication number
20230251584
Publication date
Aug 10, 2023
TOKYO ELECTRON LIMITED
Daniel J. FULFORD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO ENHANCE LITHOGRAPHY PATTERN CREATION USING SEMICONDUCTOR...
Publication number
20230251574
Publication date
Aug 10, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
G01 - MEASURING TESTING
Information
Patent Application
PRECISION MULTI-AXIS PHOTOLITHOGRAPHY ALIGNMENT CORRECTION USING ST...
Publication number
20230161267
Publication date
May 25, 2023
TOKYO ELECTRON LIMITED
Daniel J. FULFORD
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods of Forming Patterns
Publication number
20230052800
Publication date
Feb 16, 2023
TOKYO ELECTRON LIMITED
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED METHOD FOR VERTICAL RECESS FOR 3D DEVICE INTEGRATION
Publication number
20230036597
Publication date
Feb 2, 2023
TOKYO ELECTRON LIMITED
Jeffrey SMITH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing a semiconductor apparatus having stacked de...
Publication number
20230024975
Publication date
Jan 26, 2023
TOKYO ELECTRON LIMITED
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGHLY REGULAR LOGIC DESIGN FOR EFFICIENT 3D INTEGRATION
Publication number
20220375921
Publication date
Nov 24, 2022
TOKYO ELECTRON LIMITED
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE PATTERNING WITH WET-DRY BILAYER RESIST
Publication number
20220350246
Publication date
Nov 3, 2022
TOKYO ELECTRON LIMITED
Anton J. deVilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET-DRY BILAYER RESIST DUAL TONE EXPOSURE
Publication number
20220351966
Publication date
Nov 3, 2022
TOKYO ELECTRON LIMITED
Anton J. deVilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET-DRY BILAYER RESIST
Publication number
20220350247
Publication date
Nov 3, 2022
TOKYO ELECTRON LIMITED
Anton J. deVilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOCALIZED STRESS REGIONS FOR THREE-DIMENSION CHIPLET FORMATION
Publication number
20220238380
Publication date
Jul 28, 2022
TOKYO ELECTRON LIMITED
Anton J. DEVILLIERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOCALIZED STRESS REGIONS FOR THREE-DIMENSION CHIPLET FORMATION
Publication number
20220238328
Publication date
Jul 28, 2022
TOKYO ELECTRON LIMITED
Anton J. DEVILLIERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Recessing a Fill Material Within Openings Formed on a Pa...
Publication number
20220172991
Publication date
Jun 2, 2022
TOKYO ELECTRON LIMITED
Anton deVilliers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR THRESHOLD VOLTAGE TUNING THROUGH SELECTIVE DEPOSITION OF...
Publication number
20220148924
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Jeffrey SMITH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Holding Apparatus and Method for Shape Metrology
Publication number
20220143786
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Hoyoung Kang
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
COAXIAL CONTACTS FOR 3D LOGIC AND MEMORY
Publication number
20220130864
Publication date
Apr 28, 2022
TOKYO ELECTRON LIMITED
Lars Liebmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF 3D LOGIC FABRICATION TO SEQUENTIALLY DECREASE PROCESSING...
Publication number
20220122892
Publication date
Apr 21, 2022
TOKYO ELECTRON LIMITED
Jeffrey SMITH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MAKING 3D CIRCUITS WITH INTEGRATED STACKED 3D METAL LINES...
Publication number
20220115271
Publication date
Apr 14, 2022
TOKYO ELECTRON LIMITED
Mark I. GARDNER
H01 - BASIC ELECTRIC ELEMENTS