Anton Lengel

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Reflective optical element for use in an EUV system
- Patent number 8,342,701
- Issue date Jan 1, 2013
- Carl Zeiss Laser Optics GmbH
- Holger Kierey
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
BANDWIDTH NARROWING MODULE FOR SETTING A SPECTRAL BANDWIDTH OF A LA...
- Publication number 20120099612
- Publication date Apr 26, 2012
- CARL ZEISS LASER OPTICS GmbH
- Markus Deubel
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM
- Publication number 20110051267
- Publication date Mar 3, 2011
- CARL ZEISS LASER OPTICS GmbH
- Holger Kierey
- G02 - OPTICS