Anton Vihervaara

Person

Helsinki, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition processes
- Patent number 12,104,250
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,065,739
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,814,715
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,492,703
- Issue date Nov 8, 2022
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Vapor Deposition Processes
- Publication number 20240368763
- Publication date Nov 7, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for depositing transition metal carbide
- Publication number 20240279800
- Publication date Aug 22, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER
- Publication number 20240279805
- Publication date Aug 22, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20230063199
- Publication date Mar 2, 2023
- ASM IP HOLDING, B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20220389583
- Publication date Dec 8, 2022
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20210317576
- Publication date Oct 14, 2021
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Anton Vihervaara

Person

Patents Grantslast 30 patents

Vapor deposition processes

Vapor deposition processes

Cyclic deposition methods for forming metal-containing material and...

Cyclic deposition methods for forming metal-containing material and...

Patents Applicationslast 30 patents

Vapor Deposition Processes

Method and system for depositing transition metal carbide

METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER

Vapor Deposition Processes

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...