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Antonie Ellert Duisterwinkel
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Delft, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic projection apparatus, device manufacturing method, dev...
Patent number
6,724,460
Issue date
Apr 20, 2004
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method and device for measuring contamination of a surface of a com...
Publication number
20040227102
Publication date
Nov 18, 2004
ASML NETHERLANDS B.V.
Ralph Kurt
G01 - MEASURING TESTING
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Patent Application
Lithographic projection apparatus, device manufacturing method, dev...
Publication number
20030095240
Publication date
May 22, 2003
ASM LITHOGRAPHY B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY