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Antonie Hendrik Verweij
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Dussen, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Support table for a lithographic apparatus, method of loading a sub...
Patent number
11,898,601
Issue date
Feb 13, 2024
ASML Netherlands B.V.
Siegfried Alexander Tromp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Object stage bearing for lithographic apparatus
Patent number
11,442,369
Issue date
Sep 13, 2022
ASML Netherlands B.V.
Yang-Shan Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Tubular linear actuator, patterning device masking device and litho...
Patent number
11,262,663
Issue date
Mar 1, 2022
ASML Netherlands B.V.
Peter Michel Silvester Maria Heijmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle traps and barriers for particle suppression
Patent number
11,175,596
Issue date
Nov 16, 2021
ASML Netherlands B.V.
Han-Kwang Nienhuys
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Support table for a lithographic apparatus, method of loading a sub...
Patent number
11,098,759
Issue date
Aug 24, 2021
ASML Netherlands B.V.
Siegfried Alexander Tromp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support, method for loading a substrate on a substrate su...
Patent number
10,656,536
Issue date
May 19, 2020
ASML Netherlands B.V.
Martinus Hendrikus Antonius Leenders
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support table for a lithographic apparatus, method of loading a sub...
Patent number
10,527,092
Issue date
Jan 7, 2020
ASML Netherlands B.V.
Siegfried Alexander Tromp
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus and method for reducing stray radiation
Patent number
9,188,881
Issue date
Nov 17, 2015
ASML Netherlands B.V.
Marcel Mathijs Theodore Marie Dierichs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,518,705
Issue date
Apr 14, 2009
ASML Netherlands B.V.
Antonie Hendrik Verweij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, METHOD OF LOADING A SUB...
Publication number
20210381548
Publication date
Dec 9, 2021
ASML NETHERLANDS B.V.
Siegfried Alexander TROMP
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Tubular Linear Actuator, Patterning Device Masking Device and Litho...
Publication number
20210080840
Publication date
Mar 18, 2021
ASML NETHERLANDS B.V.
Peter Michel Silvester Maria HEIJMANS
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Object Stage Bearing for Lithographic Apparatus
Publication number
20200333717
Publication date
Oct 22, 2020
ASML NETHERLANDS B.V.
Yang-Shan HUANG
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Particle Traps and Barriers for Particle Suppression
Publication number
20200225591
Publication date
Jul 16, 2020
ASML Netherlands B,V.
Han-Kwang NIENHUYS
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, METHOD OF LOADING A SUB...
Publication number
20200141445
Publication date
May 7, 2020
ASML NETHERLANDS B.V.
Siegfried Alexander TROMP
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, METHOD OF LOADING A SUB...
Publication number
20170292566
Publication date
Oct 12, 2017
ASML Netherlands B.V.
Siegfried Alexander TROMP
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE SUPPORT, METHOD FOR LOADING A SUBSTRATE ON A SUBSTRATE SU...
Publication number
20170192359
Publication date
Jul 6, 2017
ASML NETHERLANDS B.V.
Martinus Hendrikus Antonius LEENDERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR REDUCING STRAY RADIATION
Publication number
20120075610
Publication date
Mar 29, 2012
ASML NETHERLANDS B.V.
Marcel Mathijs Theodore Marie Dierichs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080070353
Publication date
Mar 20, 2008
ASML NETHERLANDS B.V.
Antonie Hendrik Verweij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY