Antonio Arion Gellineau

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for targeted monitoring of semiconductor measur...
- Patent number 12,019,030
- Issue date Jun 25, 2024
- KLA Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for combining x-ray metrology data sets to impr...
- Patent number 11,990,380
- Issue date May 21, 2024
- KLA Corporation
- Christopher Liman
- G01 - MEASURING TESTING
Information Patent Grant
Process monitoring of deep structures with X-ray scatterometry
- Patent number 11,955,391
- Issue date Apr 9, 2024
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for overlay measurement based on soft X-ray Sca...
- Patent number 11,698,251
- Issue date Jul 11, 2023
- KLA Corporation
- Andrei V. Shchegrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for real time measurement control
- Patent number 11,519,869
- Issue date Dec 6, 2022
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Grant
Transmission small-angle X-ray scattering metrology system
- Patent number 11,519,719
- Issue date Dec 6, 2022
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Full beam metrology for x-ray scatterometry systems
- Patent number 11,313,816
- Issue date Apr 26, 2022
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process monitoring of deep structures with X-ray scatterometry
- Patent number 11,145,559
- Issue date Oct 12, 2021
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Grant
Visualization of three-dimensional semiconductor structures
- Patent number 11,099,137
- Issue date Aug 24, 2021
- KLA Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for characterization of an x-ray beam with high...
- Patent number 11,073,487
- Issue date Jul 27, 2021
- KLA-Tencor Corporation
- Alexander Bykanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On-device metrology using target decomposition
- Patent number 10,983,227
- Issue date Apr 20, 2021
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Grant
Multilayer targets for calibration and alignment of X-ray based mea...
- Patent number 10,816,486
- Issue date Oct 27, 2020
- KLA-Tencor Corporation
- Nikolay Artemiev
- G01 - MEASURING TESTING
Information Patent Grant
Visualization of three-dimensional semiconductor structures
- Patent number 10,794,839
- Issue date Oct 6, 2020
- KLA Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Full beam metrology for X-ray scatterometry systems
- Patent number 10,775,323
- Issue date Sep 15, 2020
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission small-angle X-ray scattering metrology system
- Patent number 10,767,978
- Issue date Sep 8, 2020
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Process monitoring of deep structures with X-ray scatterometry
- Patent number 10,727,142
- Issue date Jul 28, 2020
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor metrology with information from multiple processing s...
- Patent number 10,504,759
- Issue date Dec 10, 2019
- KLA-Tencor Corporation
- Alexander Kuznetsov
- G01 - MEASURING TESTING
Information Patent Grant
Calibration of a small angle X-ray scatterometry based metrology sy...
- Patent number 10,481,111
- Issue date Nov 19, 2019
- KLA-Tencor Corporation
- John Hench
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray scatterometry metrology for high aspect ratio structures
- Patent number 10,352,695
- Issue date Jul 16, 2019
- KLA-Tencor Corporation
- Thaddeus Gerard Dziura
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Methods And Systems For Targeted Monitoring Of Semiconductor Measur...
- Publication number 20230228692
- Publication date Jul 20, 2023
- KLA Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Data Driven Parameterization And Measuremen...
- Publication number 20230169255
- Publication date Jun 1, 2023
- KLA Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20220268714
- Publication date Aug 25, 2022
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Process Monitoring Of Deep Structures With X-Ray Scatterometry
- Publication number 20210407864
- Publication date Dec 30, 2021
- KLA Corporation
- Antonio Arion Gellineau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Systems For Overlay Measurement Based On Soft X-Ray Sca...
- Publication number 20210207956
- Publication date Jul 8, 2021
- KLA Corporation
- Andrei V. Shchegrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission Small-Angle X-Ray Scattering Metrology System
- Publication number 20210088325
- Publication date Mar 25, 2021
- KLA Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Visualization of Three-Dimensional Semiconductor Structures
- Publication number 20200393386
- Publication date Dec 17, 2020
- KLA Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods And Systems For Combining X-Ray Metrology Data Sets To Impr...
- Publication number 20200335406
- Publication date Oct 22, 2020
- KLA Corporation
- Christopher Liman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20200300790
- Publication date Sep 24, 2020
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Process Monitoring Of Deep Structures With X-Ray Scatterometry
- Publication number 20200303265
- Publication date Sep 24, 2020
- KLA Corporation
- Antonio Arion Gellineau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Visualization of Three-Dimensional Semiconductor Structures
- Publication number 20200271595
- Publication date Aug 27, 2020
- KLA-Tencor Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR FAST AUTOMATIC DETE...
- Publication number 20200025554
- Publication date Jan 23, 2020
- KLA-Tencor Corporation
- Antonio A. Gellineau
- G01 - MEASURING TESTING
Information Patent Application
Multilayer Targets For Calibration And Alignment Of X-Ray Based Mea...
- Publication number 20190302039
- Publication date Oct 3, 2019
- KLA-Tencor Corporation
- Nikolay Artemiev
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Real Time Measurement Control
- Publication number 20190293578
- Publication date Sep 26, 2019
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
On-Device Metrology Using Target Decomposition
- Publication number 20190049602
- Publication date Feb 14, 2019
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Process Monitoring Of Deep Structures With X-Ray Scatterometry
- Publication number 20180350699
- Publication date Dec 6, 2018
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Characterization Of An X-Ray Beam With High...
- Publication number 20180328868
- Publication date Nov 15, 2018
- KLA-Tencor Corporation
- Alexander Bykanov
- G01 - MEASURING TESTING
Information Patent Application
Transmission Small-Angle X-Ray Scattering Metrology System
- Publication number 20180299259
- Publication date Oct 18, 2018
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Calibration Of A Small Angle X-Ray Scatterometry Based Metrology Sy...
- Publication number 20180113084
- Publication date Apr 26, 2018
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20180106735
- Publication date Apr 19, 2018
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor Metrology With Information From Multiple Processing S...
- Publication number 20170287751
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Alexander Kuznetsov
- G01 - MEASURING TESTING
Information Patent Application
X-Ray Scatterometry Metrology For High Aspect Ratio Structures
- Publication number 20170167862
- Publication date Jun 15, 2017
- KLA-Tencor Corporation
- Thaddeus Gerard Dziura
- G01 - MEASURING TESTING

Antonio Arion Gellineau

Person

Patents Grantslast 30 patents

Methods and systems for targeted monitoring of semiconductor measur...

Methods and systems for combining x-ray metrology data sets to impr...

Process monitoring of deep structures with X-ray scatterometry

Methods and systems for overlay measurement based on soft X-ray Sca...

Methods and systems for real time measurement control

Transmission small-angle X-ray scattering metrology system

Full beam metrology for x-ray scatterometry systems

Process monitoring of deep structures with X-ray scatterometry

Visualization of three-dimensional semiconductor structures

Methods and systems for characterization of an x-ray beam with high...

On-device metrology using target decomposition

Multilayer targets for calibration and alignment of X-ray based mea...

Visualization of three-dimensional semiconductor structures

Full beam metrology for X-ray scatterometry systems

Transmission small-angle X-ray scattering metrology system

Process monitoring of deep structures with X-ray scatterometry

Semiconductor metrology with information from multiple processing s...

Calibration of a small angle X-ray scatterometry based metrology sy...

X-ray scatterometry metrology for high aspect ratio structures

Patents Applicationslast 30 patents

Methods And Systems For Targeted Monitoring Of Semiconductor Measur...

Methods And Systems For Data Driven Parameterization And Measuremen...

Full Beam Metrology For X-Ray Scatterometry Systems

Process Monitoring Of Deep Structures With X-Ray Scatterometry

Methods And Systems For Overlay Measurement Based On Soft X-Ray Sca...

Transmission Small-Angle X-Ray Scattering Metrology System

Visualization of Three-Dimensional Semiconductor Structures

Methods And Systems For Combining X-Ray Metrology Data Sets To Impr...

Full Beam Metrology For X-Ray Scatterometry Systems

Process Monitoring Of Deep Structures With X-Ray Scatterometry

Visualization of Three-Dimensional Semiconductor Structures

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR FAST AUTOMATIC DETE...

Multilayer Targets For Calibration And Alignment Of X-Ray Based Mea...

Methods And Systems For Real Time Measurement Control

On-Device Metrology Using Target Decomposition

Process Monitoring Of Deep Structures With X-Ray Scatterometry

Methods And Systems For Characterization Of An X-Ray Beam With High...

Transmission Small-Angle X-Ray Scattering Metrology System

Calibration Of A Small Angle X-Ray Scatterometry Based Metrology Sy...

Full Beam Metrology For X-Ray Scatterometry Systems

Semiconductor Metrology With Information From Multiple Processing S...

X-Ray Scatterometry Metrology For High Aspect Ratio Structures