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Antonio C. Berti
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Marlborough, MA, US
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Patent Grant
Self-aligned cobalt silicide on MOS integrated circuits
Patent number
5,736,461
Issue date
Apr 7, 1998
Digital Equipment Corporation
Antonio Carlo Berti
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Self-aligned cobalt silicide on MOS integrated circuits
Patent number
5,567,651
Issue date
Oct 22, 1996
Digital Equipment Corporation
Antonio C. Berti
H01 - BASIC ELECTRIC ELEMENTS