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Antonio Mani
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Leuven, BE
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Patents Grants
last 30 patents
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Patent Grant
Measurement of overlay error using device inspection system
Patent number
11,784,097
Issue date
Oct 10, 2023
KLA-Tencor Corporation
Choon Hoong Hoo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement of overlay error using device inspection system
Patent number
10,943,838
Issue date
Mar 9, 2021
KLA-Tencor Corporation
Choon Hoong Hoo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Identifying nuisances and defects of interest in defects detected o...
Patent number
10,699,926
Issue date
Jun 30, 2020
KLA-Tencor Corp.
Martin Plihal
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology guided inspection sample shaping of optical inspection re...
Patent number
10,598,617
Issue date
Mar 24, 2020
KLA-Tencor Corporation
Kaushik Sah
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Measurement of Overlay Error Using Device Inspection System
Publication number
20210159128
Publication date
May 27, 2021
KLA-Tencor Corporation
Choon Hoong Hoo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Measurement of Overlay Error Using Device Inspection System
Publication number
20190252270
Publication date
Aug 15, 2019
KLA-Tencor Corporation
Choon Hoong Hoo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Identifying Nuisances and Defects of Interest in Defects Detected o...
Publication number
20190067060
Publication date
Feb 28, 2019
KLA-Tencor Corporation
Martin Plihal
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Metrology Guided Inspection Sample Shaping of Optical Inspection Re...
Publication number
20180321168
Publication date
Nov 8, 2018
KLA-Tencor Corporation
Kaushik Sah
G01 - MEASURING TESTING