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Antonius Arnoldus Henricus Van Der Steen
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last 30 patents
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Patent Grant
Gas manifold, module for a lithographic apparatus, lithographic app...
Patent number
8,675,170
Issue date
Mar 18, 2014
ASML Netherlands B.V.
Frank Johannes Jacobus Van Boxtel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas manifold, module for a lithographic apparatus, lithographic app...
Patent number
8,675,169
Issue date
Mar 18, 2014
ASML Netherlands B.V.
Frank Johannes Jacobus Van Boxtel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY