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Antti IIHOLA
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Helsinki, FI
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last 30 patents
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Patent Grant
Manufacturing method of a multi-level micromechanical structure on...
Patent number
9,969,615
Issue date
May 15, 2018
Murata Manufacturing Co., Ltd.
Antti Iihola
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-level micromechanical structure
Patent number
9,764,942
Issue date
Sep 19, 2017
Murata Manufacturing Co., Ltd.
Antti Iihola
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a MEMS structure
Patent number
9,334,160
Issue date
May 10, 2016
Murata Manufacturing Co., Ltd.
Altti Torkkeli
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR SEALING A MEMS DEVICE AND A SEALED MEMS DEVICE
Publication number
20240116753
Publication date
Apr 11, 2024
Murata Manufacturing Co., Ltd.
Antti IIHOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRUCTURE INCLUDING A CAP WITH A VIA
Publication number
20200283292
Publication date
Sep 10, 2020
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-LEVEL MICROMECHANICAL STRUCTURE
Publication number
20160332864
Publication date
Nov 17, 2016
Murata Manufacturing Co., Ltd.
Antti IIHOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD OF A MULTI-LEVEL MICROMECHANICAL STRUCTURE
Publication number
20160332872
Publication date
Nov 17, 2016
Murata Manufacturing Co., Ltd.
Antti IIHOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE
Publication number
20150336793
Publication date
Nov 26, 2015
MURATA MANUFACTURING CO., LTD.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY