Antti IIHOLA

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Helsinki, FI

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Patents Grantslast 30 patents

Information Patent Grant
MEMS structure including a cap with a via
- Patent number 12,043,542
- Issue date Jul 23, 2024
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of a multi-level micromechanical structure on...
- Patent number 9,969,615
- Issue date May 15, 2018
- Murata Manufacturing Co., Ltd.
- Antti Iihola
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level micromechanical structure
- Patent number 9,764,942
- Issue date Sep 19, 2017
- Murata Manufacturing Co., Ltd.
- Antti Iihola
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a MEMS structure
- Patent number 9,334,160
- Issue date May 10, 2016
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SEALING A MEMS DEVICE AND A SEALED MEMS DEVICE
- Publication number 20240116753
- Publication date Apr 11, 2024
- Murata Manufacturing Co., Ltd.
- Antti IIHOLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A CAP WITH A VIA
- Publication number 20200283292
- Publication date Sep 10, 2020
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROMECHANICAL STRUCTURE
- Publication number 20160332864
- Publication date Nov 17, 2016
- Murata Manufacturing Co., Ltd.
- Antti IIHOLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF A MULTI-LEVEL MICROMECHANICAL STRUCTURE
- Publication number 20160332872
- Publication date Nov 17, 2016
- Murata Manufacturing Co., Ltd.
- Antti IIHOLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE
- Publication number 20150336793
- Publication date Nov 26, 2015
- MURATA MANUFACTURING CO., LTD.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY