Anupama Mallikarjunan

Person

San Marcos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 12,163,224
- Issue date Dec 10, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for making silicon containing films
- Patent number 11,626,279
- Issue date Apr 11, 2023
- VERSUM MATERIALS US, LLC
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-based films and methods of forming the same
- Patent number 10,422,034
- Issue date Sep 24, 2019
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier materials for display devices
- Patent number 10,319,862
- Issue date Jun 11, 2019
- VERSUM MATERIALS US, LLC
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 10,283,350
- Issue date May 7, 2019
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
High temperature atomic layer deposition of silicon-containing films
- Patent number 10,283,348
- Issue date May 7, 2019
- VERSUM MATERIALS US, LLC
- Meiliang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for carbon doped silicon contai...
- Patent number 10,145,008
- Issue date Dec 4, 2018
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminodisilane precursors and methods for depositing films com...
- Patent number 10,077,364
- Issue date Sep 18, 2018
- VERSUM MATERIALS US, LLC
- Steven Gerard Mayorga
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 9,997,350
- Issue date Jun 12, 2018
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods for depositing silicon nitride films
- Patent number 9,905,415
- Issue date Feb 27, 2018
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-based films and methods of forming the same
- Patent number 9,879,340
- Issue date Jan 30, 2018
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminodisilane precursors and methods for depositing films com...
- Patent number 9,627,193
- Issue date Apr 18, 2017
- VERSUM MATERIALS US, LLC
- Steven Gerard Mayorga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 9,613,799
- Issue date Apr 4, 2017
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 9,337,018
- Issue date May 10, 2016
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric barrier deposition using nitrogen containing precursor
- Patent number 8,889,235
- Issue date Nov 18, 2014
- Air Products and Chemicals, Inc.
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective etching and formation of xenon difluoride
- Patent number 8,278,222
- Issue date Oct 2, 2012
- Air Products and Chemicals, Inc.
- Dingjun Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Methods for Depositing Films with Organoaminodisilane Precursors
- Publication number 20180294152
- Publication date Oct 11, 2018
- Versum Materials US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRI...
- Publication number 20180274097
- Publication date Sep 27, 2018
- VERSUM MATERIALS US, LLC
- Xinjian LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon-Based Films and Methods of Forming the Same
- Publication number 20180119276
- Publication date May 3, 2018
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compositions and Methods Using Same for Carbon Doped Silicon Contai...
- Publication number 20180033614
- Publication date Feb 1, 2018
- Versum Materials US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...
- Publication number 20180023192
- Publication date Jan 25, 2018
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Atomic Layer Deposition of Silicon-Containing Films
- Publication number 20170207082
- Publication date Jul 20, 2017
- Versum Materials US, LLC
- Meiliang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organoaminodisilane Precursors and Methods for Depositing Films Com...
- Publication number 20170183502
- Publication date Jun 29, 2017
- Versum Materials US, LLC
- Steven Gerard Mayorga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing Films with Organoaminodisilane Precursors
- Publication number 20170186605
- Publication date Jun 29, 2017
- Versum Materials US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING FILMS WITH ORGANOAMINODISILANE PRECURSORS
- Publication number 20160203975
- Publication date Jul 14, 2016
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SILICON-BASED FILMS AND METHODS OF FORMING THE SAME
- Publication number 20160122869
- Publication date May 5, 2016
- Air Products and Chemicals, Inc.
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR THE DEPOSITION OF SILICON OXIDE FILMS
- Publication number 20150275355
- Publication date Oct 1, 2015
- Air Products and Chemicals, Inc.
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing Silicon Nitride Films
- Publication number 20150099375
- Publication date Apr 9, 2015
- Air Products and Chemicals, Inc.
- Chandra Haripin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Organoaminodisilane Precursors and Methods for Depositing Films Com...
- Publication number 20150024608
- Publication date Jan 22, 2015
- Air Products and Chemicals, Inc.
- Steven Gerard Mayorga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER MATERIALS FOR DISPLAY DEVICES
- Publication number 20150021599
- Publication date Jan 22, 2015
- Air Products and Chemicals, Inc.
- Robert Gordon Ridgeway
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR MAKING SILICON CONTAINING FILMS
- Publication number 20150014823
- Publication date Jan 15, 2015
- Air Products and Chemicals, Inc.
- Anupama Mallikarjunan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COM...
- Publication number 20130323435
- Publication date Dec 5, 2013
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oxygen Containing Precursors for Photovoltaic Passivation
- Publication number 20130247971
- Publication date Sep 26, 2013
- Air Products and Chemicals, Inc.
- Mary Kathryn Haas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors for Photovoltaic Passivation
- Publication number 20130220410
- Publication date Aug 29, 2013
- Air Products and Chemicals, Inc.
- Mary Kathryn Haas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dielectric Barrier Deposition Using Nitrogen Containing Precursor
- Publication number 20100291321
- Publication date Nov 18, 2010
- Air Products and Chemicals, Inc.
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Etching and Formation of Xenon Difluoride
- Publication number 20100022095
- Publication date Jan 28, 2010
- Air Products and Chemicals, Inc.
- Dingjun Wu
- B08 - CLEANING

Anupama Mallikarjunan

Person

Patents Grantslast 30 patents

Methods for depositing a conformal metal or metalloid silicon nitri...

Compositions and methods for making silicon containing films

Silicon-based films and methods of forming the same

Barrier materials for display devices

Methods for depositing films with organoaminodisilane precursors

High temperature atomic layer deposition of silicon-containing films

Compositions and methods using same for carbon doped silicon contai...

Organoaminodisilane precursors and methods for depositing films com...

Methods for depositing films with organoaminodisilane precursors

Methods for depositing silicon nitride films

Silicon-based films and methods of forming the same

Organoaminodisilane precursors and methods for depositing films com...

Methods for depositing films with organoaminodisilane precursors

Methods for depositing films with organoaminodisilane precursors

Dielectric barrier deposition using nitrogen containing precursor

Selective etching and formation of xenon difluoride

Patents Applicationslast 30 patents

Methods for Depositing Films with Organoaminodisilane Precursors

METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRI...

Silicon-Based Films and Methods of Forming the Same

Compositions and Methods Using Same for Carbon Doped Silicon Contai...

COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...

High Temperature Atomic Layer Deposition of Silicon-Containing Films

Organoaminodisilane Precursors and Methods for Depositing Films Com...

Methods for Depositing Films with Organoaminodisilane Precursors

METHODS FOR DEPOSITING FILMS WITH ORGANOAMINODISILANE PRECURSORS

SILICON-BASED FILMS AND METHODS OF FORMING THE SAME

COMPOSITIONS AND METHODS FOR THE DEPOSITION OF SILICON OXIDE FILMS

Methods for Depositing Silicon Nitride Films

Organoaminodisilane Precursors and Methods for Depositing Films Com...

BARRIER MATERIALS FOR DISPLAY DEVICES

COMPOSITIONS AND METHODS FOR MAKING SILICON CONTAINING FILMS

ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COM...

Oxygen Containing Precursors for Photovoltaic Passivation

Precursors for Photovoltaic Passivation

Dielectric Barrier Deposition Using Nitrogen Containing Precursor

Selective Etching and Formation of Xenon Difluoride